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Title:
MEMS SWITCH
Document Type and Number:
WIPO Patent Application WO/2011/148698
Kind Code:
A1
Abstract:
Disclosed is a MEMS switch that minimizes closed-switch stiction and allows stable signal transmission when the switch is in a closed state. A first fixed terminal (FT11) and second fixed terminal (FT12) in the disclosed MEMS switch (10-1) have a cross-sectional shape in which the ends of said fixed terminals approach the closest to a movable terminal (MT) and the parts of said fixed terminals other than said ends are farther from the movable terminal (MT) than said ends are. When the switch is closed, the movable terminal (MT) contacts the ends of the first fixed terminal (FT11) and the second fixed terminal (FT12), with each contact area constituting a line.

Inventors:
FUJII, Tomonori (LTD. 16-20 Ueno 6-chome, Taito-k, Tokyo 05, 〒1100005, JP)
藤井　知徳 (〒05 東京都台東区上野６丁目１６番２０号　太陽誘電株式会社内 Tokyo, 〒1100005, JP)
NAKAMURA, Kentaro (LTD. 16-20 Ueno 6-chome, Taito-k, Tokyo 05, 〒1100005, JP)
中村　健太郎 (〒05 東京都台東区上野６丁目１６番２０号　太陽誘電株式会社内 Tokyo, 〒1100005, JP)
Application Number:
JP2011/055743
Publication Date:
December 01, 2011
Filing Date:
March 11, 2011
Export Citation:
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Assignee:
TAIYO YUDEN CO.,LTD. (16-20, Ueno 6-chome Taito-k, Tokyo 05, 〒1100005, JP)
太陽誘電株式会社 (〒05 東京都台東区上野６丁目１６番２０号 Tokyo, 〒1100005, JP)
FUJII, Tomonori (LTD. 16-20 Ueno 6-chome, Taito-k, Tokyo 05, 〒1100005, JP)
藤井　知徳 (〒05 東京都台東区上野６丁目１６番２０号　太陽誘電株式会社内 Tokyo, 〒1100005, JP)
NAKAMURA, Kentaro (LTD. 16-20 Ueno 6-chome, Taito-k, Tokyo 05, 〒1100005, JP)
International Classes:
H01H57/00; B81B3/00; H01H1/26
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