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Title:
MEMS SWITCH
Document Type and Number:
WIPO Patent Application WO/2013/051064
Kind Code:
A1
Abstract:
[Problem] To provide a MEMS switch that is easy to manufacture and with which sticking can be controlled effectively. [Solution] This MEMS switch has: a fixed support part; a plate-shaped flexible beam having a movable surface at least one end of which is affixed to and extends from the fixed support part; a movable electrical contact arranged on the movable surface of the flexible beam; a fixed electrical contact, the position of which is fixed with respect to the fixed support part, and which opposes the movable electrical contact; a first piezoelectric drive element, which extends above the movable surface of the flexible beam from the fixed support part toward the movable electrical contact, and is capable of displacing the movable electrical contact toward the fixed electrical contact by means of voltage driving; and a second piezoelectric drive element, which is arranged on at least the movable surface of the flexible beam, and which, by means of voltage driving, drives the movable part of the flexible beam in a direction in which the movable electrical contact separates from the fixed electrical contact.

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Inventors:
TOYODA, Osamu (1-1 Kamikodanaka 4-chome, Nakahara-ku, Kawasaki-sh, Kanagawa 88, 〒2118588, JP)
豊田 治 (〒88 神奈川県川崎市中原区上小田中4丁目1番1号富士通株式会社内 Kanagawa, 〒2118588, JP)
Application Number:
JP2011/005632
Publication Date:
April 11, 2013
Filing Date:
October 06, 2011
Export Citation:
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Assignee:
FUJITSU LIMITED (1-1 Kamikodanaka 4-chome, Nakahara-ku Kawasaki-sh, Kanagawa 88, 〒2118588, JP)
富士通株式会社 (〒88 神奈川県川崎市中原区上小田中4丁目1番1号 Kanagawa, 〒2118588, JP)
TOYODA, Osamu (1-1 Kamikodanaka 4-chome, Nakahara-ku, Kawasaki-sh, Kanagawa 88, 〒2118588, JP)
International Classes:
H01H57/00
Foreign References:
JP2008177074A2008-07-31
JP2006346830A2006-12-28
Attorney, Agent or Firm:
TAKAHASHI, Keishiro (TAKAHASHI & KITAYAMA 6th Fl, New Jied Bldg. 3-22-8, Ueno, Taito-k, Tokyo 05, 〒1100005, JP)
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Claims: