Title:
MEMS-SWITCHED STEPPED VARIABLE CAPACITOR AND METHOD OF MAKING GAME
Document Type and Number:
WIPO Patent Application WO2002052592
Kind Code:
A3
Abstract:
The present invention relates to a stepped micro electromechanical structure (MEMS) capacitor that is actuated by a plurality of MEMS switches may be within the stepped capacitor circuit, or they may be actuated by an independent circuit. The stepped capacitor may also be varied with intermediate steps of capacitance by providing at least one variable capacitor in the stepped MEMS capacitor structure.
Inventors:
MA QING
RAO VALLURI R
CHENG PENG
RAO VALLURI R
CHENG PENG
Application Number:
PCT/US2001/044454
Publication Date:
March 27, 2003
Filing Date:
November 26, 2001
Export Citation:
Assignee:
INTEL CORP (US)
International Classes:
B81B3/00; H01G5/00; H01G5/38; H01G5/16; (IPC1-7): H01G5/16; H01L21/20
Foreign References:
| US5880921A | 1999-03-09 | |||
| US6049702A | 2000-04-11 | |||
| US6150901A | 2000-11-21 | |||
| US6034414A | 2000-03-07 |
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