Title:
MEMS TYPE OSCILLATOR, PROCESS FOR FABRICATING THE SAME, FILTER, AND COMMUNICATION UNIT
Document Type and Number:
WIPO Patent Application WO/2005/004326
Kind Code:
A1
Abstract:
An MEMS type oscillator capable of using a primary oscillation mode while enhancing the S/N ratio of an output signal, its fabricating process, a filter, and a highly reliable communication unit employing that filter. The MEMS type oscillator comprises an output electrode, an input-side oscillatory beam disposed oppositely to the output electrode, and an input electrode, wherein the output electrode and the input electrode (27) are formed separately from the beam in terms of DC. The filter employs the MEMS type oscillator. The communication unit employs the inventive filter for limiting the band of a transmitting signal and/or a receiving signal.
Inventors:
TADA MASAHIRO (JP)
Application Number:
PCT/JP2004/009758
Publication Date:
January 13, 2005
Filing Date:
July 02, 2004
Export Citation:
Assignee:
SONY CORP (JP)
TADA MASAHIRO (JP)
TADA MASAHIRO (JP)
International Classes:
H03H3/007; H03H9/24; (IPC1-7): H03H9/24; B81B3/00; B81C1/00
Foreign References:
| JP2001308677A | 2001-11-02 | |||
| JP2002535865A | 2002-10-22 | |||
| JPS6468114A | 1989-03-14 |
Other References:
NGUYEN C.T.& HOWE R.T.: "Design and performance of CMOS micromechanical resonator oscillators", PROCEEDINGS OF THE 1994 IEEE, vol. 48, 1994, pages 127 - 134, XP010137882
Attorney, Agent or Firm:
Tsunoda, Yoshisue (8-1 Nishishinjuku 1-chom, Shinjuku-ku Tokyo, JP)
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