Title:
MEMS VARIABLE CAPACITOR AND METHOD FOR DRIVING THE SAME
Document Type and Number:
WIPO Patent Application WO/2011/149311
Kind Code:
A2
Abstract:
Disclosed herein is an MEMS variable capacitor and its driving method, the MEMS variable capacitor including, a first electrode, a second electrode floating over the first electrode upper part, a fixed electrode separated at the second electrode side surface, and a drifting electrode placed between the second electrode and the fixed electrode, connected to the second electrode, and physically contacting the fixed electrode by a voltage applied to the fixed electrode.
Inventors:
PARK, Dongchan (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
YOON, Junbo (404-202, Expo Apt. Jeonmin-dong, Yuseong-gu, Daejeon 305-762, KR)
CHOI, Donghun (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
YANG, Hyunho (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
CHO, Sungbae (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
SONG, Juyoung (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
LEE, Sanghun (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
HAN, Changhun (511 National Nanofab Center, Kaist Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
KIM, Changwook (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
YOON, Junbo (404-202, Expo Apt. Jeonmin-dong, Yuseong-gu, Daejeon 305-762, KR)
CHOI, Donghun (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
YANG, Hyunho (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
CHO, Sungbae (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
SONG, Juyoung (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
LEE, Sanghun (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
HAN, Changhun (511 National Nanofab Center, Kaist Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
KIM, Changwook (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
Application Number:
KR2011/003921
Publication Date:
December 01, 2011
Filing Date:
May 27, 2011
Export Citation:
Assignee:
LG INNOTEK CO., LTD. (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY (373-1, Guseong-dong Yuseong-gu, Daejeon 305-701, KR)
PARK, Dongchan (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
YOON, Junbo (404-202, Expo Apt. Jeonmin-dong, Yuseong-gu, Daejeon 305-762, KR)
CHOI, Donghun (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
YANG, Hyunho (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
CHO, Sungbae (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
SONG, Juyoung (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
LEE, Sanghun (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
HAN, Changhun (511 National Nanofab Center, Kaist Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
KIM, Changwook (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY (373-1, Guseong-dong Yuseong-gu, Daejeon 305-701, KR)
PARK, Dongchan (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
YOON, Junbo (404-202, Expo Apt. Jeonmin-dong, Yuseong-gu, Daejeon 305-762, KR)
CHOI, Donghun (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
YANG, Hyunho (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
CHO, Sungbae (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
SONG, Juyoung (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
LEE, Sanghun (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
HAN, Changhun (511 National Nanofab Center, Kaist Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
KIM, Changwook (20th Fl. Seoul Square, 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
International Classes:
H01G5/16
Attorney, Agent or Firm:
JIN, Cheon Woong et al. (4th Fl, Deuk-Young Bldg.423-5 Dogok-dong, Gangnam-gu, Seoul 135-855, KR)
Claims: