Title:
MEMS VARIABLE CAPACITOR
Document Type and Number:
WIPO Patent Application WO/2011/152653
Kind Code:
A2
Abstract:
Disclosed is a MEMS variable capacitor, the capacitor including a first electrode, a second electrode that is floated on an upper surface of the first electrode, and a third electrode capable of variably-adjusting a capacitance value by adjusting a gap between the first electrode and the second electrode.
Inventors:
PARK, Dongchan (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
YOON, Junbo (404-202, Expo Apt. Jeonmin-dong, Yuseong-gu, Daejeon 305-762, KR)
CHOI, Donghun (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
LEE, Sanghun (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
KIM, Changwook (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
CHO, Sungbae (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
SONG, Juyoung (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
YANG, Hyunho (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
HAN, Changhun (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
YOON, Junbo (404-202, Expo Apt. Jeonmin-dong, Yuseong-gu, Daejeon 305-762, KR)
CHOI, Donghun (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
LEE, Sanghun (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
KIM, Changwook (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
CHO, Sungbae (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
SONG, Juyoung (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
YANG, Hyunho (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
HAN, Changhun (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
Application Number:
KR2011/003991
Publication Date:
December 08, 2011
Filing Date:
June 01, 2011
Export Citation:
Assignee:
LG INNOTEK CO., LTD. (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY (373-1, Guseong-dong Yuseong-gu, Daejeon 305-701, KR)
PARK, Dongchan (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
YOON, Junbo (404-202, Expo Apt. Jeonmin-dong, Yuseong-gu, Daejeon 305-762, KR)
CHOI, Donghun (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
LEE, Sanghun (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
KIM, Changwook (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
CHO, Sungbae (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
SONG, Juyoung (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
YANG, Hyunho (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
HAN, Changhun (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY (373-1, Guseong-dong Yuseong-gu, Daejeon 305-701, KR)
PARK, Dongchan (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
YOON, Junbo (404-202, Expo Apt. Jeonmin-dong, Yuseong-gu, Daejeon 305-762, KR)
CHOI, Donghun (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
LEE, Sanghun (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
KIM, Changwook (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
CHO, Sungbae (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
SONG, Juyoung (20th Fl. Seoul Square 541 Namdaemunno 5-ga Jung-gu, Seoul 100-714, KR)
YANG, Hyunho (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
HAN, Changhun (511 National NanoFab Center, KAIST Guseong-dong, Yuseong-gu, Daejeon 305-701, KR)
International Classes:
H01G5/16
Attorney, Agent or Firm:
JIN, Cheon Woong et al. (4th Fl, Deuk-Young Bldg. 423-5 Dogok-dong, Gangnam-Gu, Seoul 135-855, KR)
Claims:
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