Title:
MEMS VIBRATOR AND MEMS OSCILLATOR
Document Type and Number:
WIPO Patent Application WO/2019/167865
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing: an MEMS vibrator which is easily reduced in film thickness, while exhibiting excellent chemical resistance and mechanical strength; and the like. The present invention is an MEMS vibrator which comprises a vibration film that is composed of a graphite film and a silicon member that supports the vibration film, and which is characterized in that: the graphite film has a thickness of 50 nm or more but less than 20 μm; and the Young's modulus of the graphite film in the film plane direction is 700 GPa or more.
Inventors:
SONE JUNJI (JP)
MURAKAMI MUTSUAKI (JP)
MURAKAMI MUTSUAKI (JP)
Application Number:
PCT/JP2019/007003
Publication Date:
September 06, 2019
Filing Date:
February 25, 2019
Export Citation:
Assignee:
KANEKA CORP (JP)
International Classes:
H03H9/24
Domestic Patent References:
| WO2012086387A1 | 2012-06-28 |
Foreign References:
| JP2003211396A | 2003-07-29 | |||
| JP2012244349A | 2012-12-10 | |||
| JPH07329237A | 1995-12-19 | |||
| JP2012150350A | 2012-08-09 | |||
| JP2009060456A | 2009-03-19 | |||
| JP2014053763A | 2014-03-20 | |||
| JP2003114182A | 2003-04-18 | |||
| JP2005156526A | 2005-06-16 | |||
| JP2011060846A | 2011-03-24 | |||
| JP2017103369A | 2017-06-08 | |||
| JP2018125696A | 2018-08-09 | |||
| JPH01259698A | 1989-10-17 | |||
| JP2018036682A | 2018-03-08 |
Other References:
SHUJI TANAKAMASAYOSHI ESASHI: "Review Paper MEMS technology", SCIENCE AND INDUSTRY, vol. 85, no. 2, 2011, pages 49 - 56
"Experimental chemistry 9 (fourth series) electricity and magnetism", 5 June 1991, MARUZEN CO., LTD., pages: 170
"Experimental chemistry 9 (fourth series) electricity and magnetism", 5 June 1991, MARUZEN CO., LTD., pages: 170
Attorney, Agent or Firm:
USFI PATENT ATTORNEYS INTERNATIONAL OFFICE (JP)
Download PDF: