Title:
MESO-MICROELECTROMECHANICAL SYSTEM HAVING A GLASS BEAM AND METHOD FOR ITS FABRICATION
Document Type and Number:
WIPO Patent Application WO2005062950
Kind Code:
A3
Abstract:
A meso-electromechanical system (900, 1100) includes a substrate (215), a standoff (405, 1160) disposed on a surface of the substrate, a first electrostatic pattern (205, 1105, 1110, 1115, 1120) disposed on the surface of the substrate, and a glass beam (810). The glass beam (810) has a fixed region (820) attached to the standoff and has a second electrostatic pattern (815, 1205, 1210, 1215, 1220) on a cantilevered location of the glass beam. The second electrostatic pattern is substantially co-extensive with and parallel to the first electrostatic pattern. The second electrostatic pattern has a relaxed separation (925) from the first electrostatic pattern when the first and second electrostatic patterns are in a non-energized state. In some embodiments, a mirror is formed by the electrostatic materials that form the second electrostatic pattern. The glass beam may be patterned using sandblasting (140).
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Inventors:
SAVIC JOVICA (US)
ELIACIN MANES (US)
LIU JUNHUA (US)
TUNGARE AROON V (US)
ELIACIN MANES (US)
LIU JUNHUA (US)
TUNGARE AROON V (US)
Application Number:
PCT/US2004/043415
Publication Date:
December 01, 2005
Filing Date:
December 22, 2004
Export Citation:
Assignee:
MOTOROLA INC (US)
SAVIC JOVICA (US)
ELIACIN MANES (US)
LIU JUNHUA (US)
TUNGARE AROON V (US)
SAVIC JOVICA (US)
ELIACIN MANES (US)
LIU JUNHUA (US)
TUNGARE AROON V (US)
International Classes:
G02B26/08; G02B26/10; H01H57/00; H02N1/00; (IPC1-7): H02N1/00; G02B26/08; G02B26/10; H01H57/00
Domestic Patent References:
| WO2000046852A1 | 2000-08-10 |
Foreign References:
| US5579151A | 1996-11-26 | |||
| US6075639A | 2000-06-13 | |||
| US20020149294A1 | 2002-10-17 |
Other References:
BELLOY E. ET AL: "Micromachining of Glass Inertia Sensors", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 11, no. 1, February 2002 (2002-02-01), pages 85 - 90, XP001124520
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