Title:
METAL ALKOXIDE COMPOUND, THIN-FILM-FORMING RAW MATERIAL, AND THIN FILM PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2019/044448
Kind Code:
A1
Abstract:
The present invention provides a metal alkoxide compound represented by general formula (1), a thin-film-forming raw material comprising this compound, and a thin film production method using this raw material to form a thin film containing a metal. [Chem. 1] (where: R1 represents a hydrogen atom or an alkyl group containing 1 to 4 carbon atoms; R2 represents an isopropyl group, a secondary butyl group, a tertiary butyl group, a secondary pentyl, a 1-ethylpropyl group, or a tertiary pentyl group; R3 represents a hydrogen or an alkyl group containing 1 to 4 carbon atoms; R4 represents an alkyl group containing 1 to 4 carbon atoms; M represents a scandium atom, an yttrium atom, a lanthanum atom, a cerium atom, a praseodymium atom, a neodymium atom, a promethium atom, a samarium atom, an europium atom, a gadolinium atom, a terbium atom, a dysprosium atom, a holmium atom, an erbium atom, a thulium atom, an ytterbium atom, or a lutetium atom; and n represents the valence of the atom represented by M; with the proviso that, if M represents a lanthanum atom, R2 represents a secondary butyl group, a tertiary butyl group, a secondary pentyl, a 1-ethylpropyl group, or a tertiary pentyl group.)
Inventors:
OKADA NANA (JP)
HATASE MASAKO (JP)
NISHIDA AKIHIRO (JP)
SAKURAI ATSUSHI (JP)
HATASE MASAKO (JP)
NISHIDA AKIHIRO (JP)
SAKURAI ATSUSHI (JP)
Application Number:
PCT/JP2018/029923
Publication Date:
March 07, 2019
Filing Date:
August 09, 2018
Export Citation:
Assignee:
ADEKA CORP (JP)
International Classes:
C07F5/00; C23C16/18; H01L21/31
Foreign References:
| JPH0625036A | 1994-02-01 | |||
| JP2006521337A | 2006-09-21 | |||
| JP2015218116A | 2015-12-07 | |||
| JP2013216614A | 2013-10-24 | |||
| CN102199166A | 2011-09-28 | |||
| KR100675983B1 | 2007-01-30 |
Other References:
"Volatile Donor-Functionalized Alkoxy Derivatives of Lutetium and Their Structural Characterization", INORG. CHEM., vol. 36, 1997, pages 3545 - 3552
See also references of EP 3677585A4
See also references of EP 3677585A4
Attorney, Agent or Firm:
SOGA, Michiharu et al. (JP)
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