Title:
METAL-FILM FORMING DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/002125
Kind Code:
A1
Abstract:
Disclosed is a metal-film forming device which comprises: a treatment vessel which houses a substrate and has an interior that is capable of switching between an atmospheric-pressure or reduced-pressure inert gas atmosphere; a substrate retaining part which is disposed inside the treatment vessel; a cup body which is disposed so as to enclose the sides of the retained substrate; an application nozzle which discharges a metal mixture onto the substrate; a holding part which is disposed outside of the cup body and holds the application nozzle which has withdrawn from above the substrate retaining part; a nozzle drive part which moves the application nozzle between the substrate retaining part and the holding part; and a nozzle transmission part which supports the application nozzle and transmits the power of the nozzle drive part to the application nozzle.
Inventors:
KISHITA, Naofumi (1-1 Fukuhara, Koshi-sh, Kumamoto 16, 〒8611116, JP)
Application Number:
JP2011/063235
Publication Date:
January 05, 2012
Filing Date:
June 09, 2011
Export Citation:
Assignee:
TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku Tokyo, 25, 〒1076325, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
International Classes:
C23C18/10; B05C9/10; B05C9/14; B05C11/08; B05D1/40; H01L21/288
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (Hazuki International, Kakubari Building 1-20, Sumiyoshi-cho, Shinjuku-k, Tokyo 65, 〒1620065, JP)
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Claims:
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