Title:
METAL PLATE AND DEPOSITION MASK USING SAME
Document Type and Number:
WIPO Patent Application WO/2019/103319
Kind Code:
A1
Abstract:
A metal plate for manufacturing a deposition mask, according to an embodiment, has a thickness of 30 μm or less and comprises an iron (Fe)-nickel (Ni) alloy metal material comprising oxygen (O) and chromium (Cr), wherein the metal material is Invar in which the atomic concentration of chromium (Cr) is 0.03 at% or less, the metal material comprises an outer part, which comprises a surface, and an inner part excluding the outer part, and the outer part has, in a depth range of 14 nm or less from the surface, a maximum atomic concentration of iron (Fe) of 60 at% or less, a maximum atomic concentration of nickel (Ni) of 40-45 at%, and a maximum atomic concentration of oxygen (O) of 10 at% or less.
More Like This:
Inventors:
LEE SANG YU (KR)
KIM NAM HO (KR)
JO YEONG DEUK (KR)
KIM NAM HO (KR)
JO YEONG DEUK (KR)
Application Number:
PCT/KR2018/012486
Publication Date:
May 31, 2019
Filing Date:
October 22, 2018
Export Citation:
Assignee:
LG INNOTEK CO LTD (KR)
International Classes:
C23C14/04; C22C38/40; H01L51/00
Foreign References:
| JP2015168847A | 2015-09-28 | |||
| KR20160146901A | 2016-12-21 | |||
| KR20170096882A | 2017-08-25 | |||
| KR20170096373A | 2017-08-24 | |||
| JP2015168884A | 2015-09-28 |
Attorney, Agent or Firm:
HAW, Yong Noke (KR)
Download PDF: