Title:
METAL PLATE FOR PRODUCING VAPOR DEPOSITION MASKS, INSPECTION METHOD FOR METAL PLATES, PRODUCTION METHOD FOR METAL PLATES, VAPOR DEPOSITION MASK, VAPOR DEPOSITION MASK DEVICE, AND PRODUCTION METHOD FOR VAPOR DEPOSITION MASKS
Document Type and Number:
WIPO Patent Application WO/2019/098168
Kind Code:
A1
Abstract:
A metal plate comprising a surface having a longitudinal direction and a width direction orthogonal to the longitudinal direction. The surface reflectance for reflected light emitted from the surface at an angle of 45° ± 0.2º in at least one plane orthogonal to the surface, is 8%–25% of the reflected light observed when light is caused to be incident on the surface.
Inventors:
IKENAGA CHIKAO (JP)
OKAMOTO HIDEYUKI (JP)
USHIKUSA MASATO (JP)
HATSUTA CHIAKI (JP)
OKA HIROKI (JP)
MATSUURA SACHIYO (JP)
OKAMOTO HIDEYUKI (JP)
USHIKUSA MASATO (JP)
HATSUTA CHIAKI (JP)
OKA HIROKI (JP)
MATSUURA SACHIYO (JP)
Application Number:
PCT/JP2018/041919
Publication Date:
May 23, 2019
Filing Date:
November 13, 2018
Export Citation:
Assignee:
DAINIPPON PRINTING CO LTD (JP)
International Classes:
C23C14/04; B21B1/22; H01L51/50; H05B33/10
Domestic Patent References:
| WO2016129533A1 | 2016-08-18 | |||
| WO2017014016A1 | 2017-01-26 | |||
| WO2017013904A1 | 2017-01-26 |
Foreign References:
| JP2016121376A | 2016-07-07 | |||
| JPS6139344A | 1986-02-25 | |||
| JPH08269742A | 1996-10-15 | |||
| JP2002012998A | 2002-01-15 | |||
| JP2002194573A | 2002-07-10 | |||
| JPH11219986A | 1999-08-10 | |||
| JP2017088914A | 2017-05-25 | |||
| JP2017088915A | 2017-05-25 | |||
| JP2008293841A | 2008-12-04 | |||
| JP2010247500A | 2010-11-04 | |||
| JP5382259B1 | 2014-01-08 | |||
| JP2001234385A | 2001-08-31 | |||
| JP2016148112A | 2016-08-18 |
Other References:
See also references of EP 3712295A4
Attorney, Agent or Firm:
NAGAI Hiroshi et al. (JP)
Download PDF: