Title:
METAL RECOVERY METHOD, METAL RECOVERY APPARATUS, EXHAUST SYSTEM, AND FILM FORMING DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2010/018768
Kind Code:
A1
Abstract:
A metal recovery apparatus (66) detoxifies exhaust gas by recovering metal components from the exhaust gas, which is discharged from a processing vessel (10) wherein a thin film is formed on the surface of processed material using a starting material gas composed of an organic metal compound starting material. The metal recovery apparatus is provided with a collection unit (80) that heats the exhaust gas and thermally decomposes unreacted starting material gas included in the exhaust gas, and that has a collection member to which metal components included in the starting material gas adhere, and a detoxifying unit (82) that has a catalyst (100) that oxidizes and detoxifies harmful gas components included in the exhaust gas that has passed through the collection unit.
Inventors:
HARA Masamichi (650 Mitsuzawa, Hosaka-cho, Nirasaki-sh, Yamanashi 92, 〒4070192, JP)
原 正道 (〒92 山梨県韮崎市穂坂町三ツ沢６５０番地 東京エレクトロンＡＴ株式会社内 Yamanashi, 〒4070192, JP)
GOMI Atsushi (650 Mitsuzawa, Hosaka-cho, Nirasaki-sh, Yamanashi 92, 〒4070192, JP)
原 正道 (〒92 山梨県韮崎市穂坂町三ツ沢６５０番地 東京エレクトロンＡＴ株式会社内 Yamanashi, 〒4070192, JP)
GOMI Atsushi (650 Mitsuzawa, Hosaka-cho, Nirasaki-sh, Yamanashi 92, 〒4070192, JP)
Application Number:
JP2009/063810
Publication Date:
February 18, 2010
Filing Date:
August 04, 2009
Export Citation:
Assignee:
TOKYO ELECTRON LIMITED (3-1 Akasaka 5-chome, Minato-ku Tokyo, 25, 〒1076325, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
HARA Masamichi (650 Mitsuzawa, Hosaka-cho, Nirasaki-sh, Yamanashi 92, 〒4070192, JP)
原 正道 (〒92 山梨県韮崎市穂坂町三ツ沢６５０番地 東京エレクトロンＡＴ株式会社内 Yamanashi, 〒4070192, JP)
東京エレクトロン株式会社 (〒25 東京都港区赤坂五丁目３番１号 Tokyo, 〒1076325, JP)
HARA Masamichi (650 Mitsuzawa, Hosaka-cho, Nirasaki-sh, Yamanashi 92, 〒4070192, JP)
原 正道 (〒92 山梨県韮崎市穂坂町三ツ沢６５０番地 東京エレクトロンＡＴ株式会社内 Yamanashi, 〒4070192, JP)
International Classes:
B01D53/64; B01D53/62; C23C16/44; F27D17/00; H01L21/28; H01L21/285; H01L21/3065
Attorney, Agent or Firm:
YOSHITAKE Kenji et al. (Kyowa Patent & Law Office, Room 323 Fuji Bldg., 2-3, Marunouchi 3-chom, Chiyoda-ku Tokyo 05, 〒1000005, JP)
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