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Title:
METAL RECOVERY METHOD, METAL RECOVERY APPARATUS, EXHAUST SYSTEM, AND FILM FORMING DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2010/018768
Kind Code:
A1
Abstract:
A metal recovery apparatus (66) detoxifies exhaust gas by recovering metal components from the exhaust gas, which is discharged from a processing vessel (10) wherein a thin film is formed on the surface of processed material using a starting material gas composed of an organic metal compound starting material.  The metal recovery apparatus is provided with a collection unit (80) that heats the exhaust gas and thermally decomposes unreacted starting material gas included in the exhaust gas, and that has a collection member to which metal components included in the starting material gas adhere, and a detoxifying unit (82) that has a catalyst (100) that oxidizes and detoxifies harmful gas components included in the exhaust gas that has passed through the collection unit.

Inventors:
HARA MASAMICHI (JP)
GOMI ATSUSHI (JP)
HATANO TATSUO (JP)
Application Number:
PCT/JP2009/063810
Publication Date:
February 18, 2010
Filing Date:
August 04, 2009
Export Citation:
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Assignee:
TOKYO ELECTRON LTD (JP)
HARA MASAMICHI (JP)
GOMI ATSUSHI (JP)
HATANO TATSUO (JP)
International Classes:
B01D53/64; B01D53/62; C23C16/44; F27D17/00; H01L21/28; H01L21/285; H01L21/3065
Domestic Patent References:
WO2007004808A12007-01-11
Foreign References:
JP2009062599A2009-03-26
JP2005003331A2005-01-06
JP2004202421A2004-07-22
JPH10263355A1998-10-06
JP2008028059A2008-02-07
JP2007039751A2007-02-15
JP2003105543A2003-04-09
JP2005185961A2005-07-14
Attorney, Agent or Firm:
YOSHITAKE Kenji et al. (JP)
Kenji Yoshitake (JP)
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