Title:
METALLIC COATINGS ON SILICON SUBSTRATES, AND METHODS OF FORMING METALLIC COATINGS ON SILICON SUBSTRATES
Document Type and Number:
WIPO Patent Application WO2006022864
Kind Code:
A3
Abstract:
The invention includes methods of forming a metallic coating (14) on a substrate (10) which contains silicon. A metallic glass layer (14) is formed over a silicon surface of the substrate (10). The invention includes methods of protecting a silicon substrate. The substrate ( 10) is provided within a deposition chamber along with a deposition target. Material from the deposition target is deposited over at least a portion of the silicon substrate (10) to form a protective layer (14) or structure which contains metallic glass. The metallic glass comprises iron and one or more of B, Si, P and C. The invention includes structures which have a substrate (10) containing silicon and a metallic layer (14) over the substrate (10). The metallic layer (14) contains less than or equal to about 2 weight % carbon and has a hardness of at least 9.2 Gpa. The metallic layer (14) can have an amorphous microstructure or can be vitrified to have a nanocrystalline microstructure.
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Inventors:
BRANAGAN DANIEL J (US)
HYDE TIMOTHY A (US)
FINCKE JAMES R (US)
HYDE TIMOTHY A (US)
FINCKE JAMES R (US)
Application Number:
PCT/US2005/010525
Publication Date:
December 07, 2006
Filing Date:
March 25, 2005
Export Citation:
Assignee:
BATTELLE ENERGY ALLIANCE LLC (US)
International Classes:
B32B9/04; B05D5/00; B32B15/04; B32B15/18; B81C1/00; C23C14/16; C23C14/58
Foreign References:
| US4398342A | 1983-08-16 | |||
| US4639543A | 1987-01-27 |
Other References:
See also references of EP 1776229A4
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