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Title:
METAMATERIAL BASED ELECTROMAGNETIC RADIATION DETECTOR
Document Type and Number:
WIPO Patent Application WO/2018/049675
Kind Code:
A1
Abstract:
A metamaterial based thermomechanical electromagnetic radiation detector comprises of a metamaterial absorber (101), legs (102) and a substrate (103). The metamaterial absorber (101), which is a sandwiched structure composed of the resonant structure (201) on top, the dielectric spacer (202) in the middle and the mirror (203) at bottom, is supported by the legs (102) and suspended on the transparent substrate (103). The leg (102) contains deformation leg (401) and thermal isolation leg (402), where the deformation leg (401) consists of a stacked layer of two materials with very different thermal expansion coefficients. When functioning, the target radiation is focused on the metamaterial absorber (101), which turns the radiation energy into heat leading to a deflection driven by the deformation legs (401). At last the amount and distribution of the deflection of the metamaterial absorber (101) is optically read out by a beam of visible light illuminating the mirror (203) through the transparent substrate (103). The electromagnetic radiation detector is fabricated using surface sacrificial layer micro-machining process and works in uncooled condition. The electromagnetic radiation detector can either work alone as a detector, or be arranged in one-dimensional or two-dimensional array as an imaging device with flexibly designed metamaterial absorber, especially suitable for IR or THz uncooled imaging applications. The advantages of the metamaterial based thermomechanical electromagnetic radiation detector include high sensitivity and resolution, good reliability and uniformity, low cost and easy fabrication.

Inventors:
YU XIAOMEI (CN)
MA WEI (CN)
WEN YONGZHENG (CN)
JIA DELIN (CN)
Application Number:
PCT/CN2016/099313
Publication Date:
March 22, 2018
Filing Date:
September 19, 2016
Export Citation:
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Assignee:
YU XIAOMEI (CN)
International Classes:
G01R29/08
Foreign References:
CN105891609A2016-08-24
CN104792420A2015-07-22
CN102351141A2012-02-15
CN101561319A2009-10-21
US20120057616A12012-03-08
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