Title:
METHOD FOR ADDING AUXILIARY GRAPH
Document Type and Number:
WIPO Patent Application WO/2018/121141
Kind Code:
A1
Abstract:
A method for adding an auxiliary graph comprises: providing an OPC target graph, selecting a rule of adding only one auxiliary graph part according to an auxiliary graph benchmark rule, and establishing an additional rule of the auxiliary graph; amplifying the whole target graph, so as to expand all edges of the target graph outwards by a distance A; subtracting, according to the additional rule of the auxiliary graph, 2A from a distance value between corresponding target graphs in the additional rule of the auxiliary graph; correspondingly adjusting, according to the distance A, other parameters affected by amplification of the whole target graph in the additional rule of the auxiliary graph; operating the additional rule of the auxiliary graph to generate a first auxiliary graph; executing the auxiliary graph benchmark rule on the target graph by using the first auxiliary graph as a newly-added reference graph, so as to generate a second auxiliary graph; and superposing the first auxiliary graph, the second auxiliary graph and other existing auxiliary graphs to form a final auxiliary graph.
Inventors:
HU HONGMEI (CN)
Application Number:
PCT/CN2017/112496
Publication Date:
July 05, 2018
Filing Date:
November 23, 2017
Export Citation:
Assignee:
SHANGHAI IC R & D CENTER CO LTD (CN)
International Classes:
G03F1/36
Foreign References:
| CN106527040A | 2017-03-22 | |||
| CN1737680A | 2006-02-22 | |||
| US20060183028A1 | 2006-08-17 | |||
| US20130101924A1 | 2013-04-25 | |||
| CN106094421A | 2016-11-09 | |||
| US20150346597A1 | 2015-12-03 | |||
| CN104977798A | 2015-10-14 |
Attorney, Agent or Firm:
SHANGHAI TIANCHEN INTELLECTUAL PROPERTY AGENCY (CN)
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