Title:
METHOD FOR ADJUSTING THE FREQUENCY OF A MEMS RESONATOR
Document Type and Number:
WIPO Patent Application WO/2005/109639
Kind Code:
A2
Abstract:
There are many inventions described and illustrated herein. These inventions are directed to a method of fabricating a microelectromechanical resonator having an output frequency that may be adjusted, tuned, set, defined and/or selected whether before and/or after final packaging. In one aspect, the method of the present invention adjusts, tunes, sets, defines and/or selects the frequency of the microelectromechanical resonator by changing and/or removing material from the mechanical structure of the resonator by resistively heating (in a selective or non-selective manner) one or more elements and/or beams of the mechanical structure (for example, the moveable or expandable electrodes and/or frequency adjustment structures).
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Inventors:
LUTZ MARKUS (US)
PARTRIDGE AARON (US)
PARTRIDGE AARON (US)
Application Number:
PCT/US2005/000745
Publication Date:
November 17, 2005
Filing Date:
January 11, 2005
Export Citation:
Assignee:
BOSCH GMBH ROBERT (DE)
LUTZ MARKUS (US)
PARTRIDGE AARON (US)
LUTZ MARKUS (US)
PARTRIDGE AARON (US)
International Classes:
H03H3/007; H03H9/02; H03H9/21; H03H9/24; (IPC1-7): H03H9/21
Foreign References:
| US5976994A | 1999-11-02 | |||
| US6707351B2 | 2004-03-16 |
Other References:
See references of EP 1743421A4
Attorney, Agent or Firm:
Steinberg, Neil A. (Suite 1150 Mountain View, CA, US)
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