Title:
METHOD FOR ANALYZING METAL IMPURITY CONTENT
Document Type and Number:
WIPO Patent Application WO/2022/102326
Kind Code:
A1
Abstract:
A method for more accurately analyzing the contents of metal impurities in a liquid (ultrapure water) containing a low concentration of metal impurities is characterized by including: a liquid passing step for allowing the liquid to pass through an ion exchanger; an elution step for eluting metal impurities captured by the ion exchanger by using the eluate and collecting the metal impurities; and a measuring step for measuring the contents of the metal impurities in the eluate by analyzing the eluate containing the eluted metal impurities, wherein the ion exchanger uses multiple ion exchangers (13A, 13B) of the same ion type connected in series, the volume of the porous ion exchangers per unit is 0.5 to 5.0 ml, and the differential pressure coefficient is 0.01 MPa/LV/m or less.
Inventors:
TSUTANO KYOHEI (JP)
Application Number:
PCT/JP2021/037874
Publication Date:
May 19, 2022
Filing Date:
October 13, 2021
Export Citation:
Assignee:
ORGANO CORP (JP)
International Classes:
B01J39/07; B01J20/281; B01J39/16; B01J39/20; B01J41/05; B01J41/14; B01J47/02; B01J47/026; B01J47/12; C02F1/42; G01N30/46; G01N30/96; G01N33/18
Domestic Patent References:
| WO2019221186A1 | 2019-11-21 |
Foreign References:
| JPH11153586A | 1999-06-08 | |||
| JP2001153854A | 2001-06-08 | |||
| JP2014028370A | 2014-02-13 | |||
| JP2010243476A | 2010-10-28 |
Attorney, Agent or Firm:
MIYAZAKI Teruo et al. (JP)
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