Title:
METHOD AND APPARATUS FOR AUTOMATIC INSPECTION OF SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/1996/009556
Kind Code:
A1
Abstract:
An automatic inspection apparatus and method capable of automatically and efficiently inspecting contact characteristics of sockets of a test portion of a semiconductor tester disposed at a test portion of a conveyor, prior to testing semiconductor devices. A testing device, which has known electrical characteristics and the same shape as that of the semiconductor devices to be tested, is mounted on a test tray, and is conveyed from a loader to a test portion. Contact characteristics are then measured by connecting the testing device to a socket. After this measurement is completed, the testing device is transferred from the test tray to a customer tray in an unloader, is temporarily stored in a tray storage portion, is conveyed to the loader, is transferred from the customer tray to the test tray, and is again conveyed from the loader to the test portion. In this way, the contact characteristics of all the sockets at the test portion are automatically and repeatedly measured.
Inventors:
ONISHI TAKESHI (JP)
KAINUMA TADASHI (JP)
KOJIMA KATSUMI (JP)
BANNAI KUNIAKI (JP)
TANAKA KOICHI (JP)
YAMADA NARUHITO (JP)
KAINUMA TADASHI (JP)
KOJIMA KATSUMI (JP)
BANNAI KUNIAKI (JP)
TANAKA KOICHI (JP)
YAMADA NARUHITO (JP)
Application Number:
PCT/JP1995/001751
Publication Date:
March 28, 1996
Filing Date:
September 04, 1995
Export Citation:
Assignee:
ADVANTEST CORP (JP)
ONISHI TAKESHI (JP)
KAINUMA TADASHI (JP)
KOJIMA KATSUMI (JP)
BANNAI KUNIAKI (JP)
TANAKA KOICHI (JP)
YAMADA NARUHITO (JP)
ONISHI TAKESHI (JP)
KAINUMA TADASHI (JP)
KOJIMA KATSUMI (JP)
BANNAI KUNIAKI (JP)
TANAKA KOICHI (JP)
YAMADA NARUHITO (JP)
International Classes:
G01R31/04; G01R31/28; (IPC1-7): G01R31/26
Foreign References:
| JPH01178877A | 1989-07-17 | |||
| JPH0317574A | 1991-01-25 |
Other References:
MICROFILM OF THE SPECIFICATION AND DRAWINGS ANNEXED TO THE WRITTEN APPLICATION OF JAPANESE UTILITY MODEL, Application No. 6326/1990 (Laid-Open No. 97676/1991) (ADVANTEST CORP.), (08.10.91).
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