Title:
METHOD AND APPARATUS FOR CLEANING PVA BRUSH
Document Type and Number:
WIPO Patent Application WO/2019/059683
Kind Code:
A1
Abstract:
Provided is a method for cleaning a PVA brush. The method for cleaning a PVA brush comprises the steps of: preparing a PVA brush; removing a siloxane compound within the PVA brush by using a cleaning liquid comprising an organic matter; and removing impurities within the PVA brush by applying vibration to the PVA brush.
Inventors:
PARK JIN-GOO (KR)
LEE JUNG HWAN (KR)
HAMADA SATOMI (JP)
LEE JUNG HWAN (KR)
HAMADA SATOMI (JP)
Application Number:
PCT/KR2018/011169
Publication Date:
March 28, 2019
Filing Date:
September 20, 2018
Export Citation:
Assignee:
EBARA CORP (JP)
IUCF HYU ERICA CAMPUS (KR)
IUCF HYU ERICA CAMPUS (KR)
International Classes:
A46D9/04; A46B17/06; A46D1/045
Foreign References:
JPH11323000A | 1999-11-26 | |||
JPH10223583A | 1998-08-21 | |||
JP2010021457A | 2010-01-28 | |||
KR20050058832A | 2005-06-17 | |||
KR20060103841A | 2006-10-04 |
Attorney, Agent or Firm:
KIM, Tae Hong et al. (KR)
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