METHOD AND APPARATUS FOR CLEANING

Title:

METHOD AND APPARATUS FOR CLEANING

Document Type and Number:

WIPO Patent Application WO/1991/013697

Kind Code:

A1

Abstract:

A cleaning method which comprises cleaning an object with a detergent prepared by compounding a basic detergent such as an organosilicon detergent or an isoparaffinic detergent with a detergency improver such as a surfactant or a hydrophilic solvent, rinsing the cleaned object with the basic detergent, and drying it with warm air or steam. Since the basic detergent can be recovered for reuse, the economic advantage of the use of a plurality of detergents is enhanced. Since the detergent comprises an organosilicon or isoparaffinic detergent and additives such as a surfactant or a hydrophilic solvent, it has degreasing and draining properties comparable to those of chlorofluorocarbon detergents and is harmless from the aspect of environmental pollution.

Inventors:

INADA MINORU (JP)
KABUKI KIMIAKI (JP)
IMAJO YASUTAKA (JP)
YAGI NORIAKI (JP)
SAITOH NOBUHIRO (JP)

Application Number:

PCT/JP1991/000359

Publication Date:

September 19, 1991

Filing Date:

March 15, 1991

Export Citation:

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Assignee:

TOSHIBA KK (JP)
JAPAN FIELD KK (JP)

International Classes:

B01D12/00; C08G65/00; C08L71/02; B08B3/08; C11D3/00; C11D3/16; C11D3/18; C11D3/37; C11D3/43; C11D7/22; C11D7/24; C11D7/50; C11D10/02; C11D11/00; C23G1/36; C23G5/02; C23G5/024; C23G5/032; C23G5/04; H01L21/304; C11D1/29; C11D1/34; C11D1/40; C11D1/62; C11D1/74; C11D3/20; C11D7/26; C11D7/28; H05K3/26; (IPC1-7): B01D12/00; B08B3/08; C11D7/50; C11D10/02; H01L21/304

Foreign References:

JPH0273896A	1990-03-13
JPS6363884B2	1988-12-08
JPS6028880B2	1985-07-06
JPS5917160B2	1984-04-19

Other References: