Title:
METHOD AND APPARATUS FOR COMMUNICATING IMAGES, DATA, OR OTHER INFORMATION IN A DEFECT SOURCE IDENTIFIER
Document Type and Number:
WIPO Patent Application WO2002030173
Kind Code:
A3
Abstract:
A method and associated apparatus for communicating defect information between a defect source identifier server and client. The method comprises creating defect inspection information within a defect source identifier client, the defect inspection information containing information regarding identified defects on semiconductor wafers. In one aspect, an XML converter converts the defect inspection information into converted defect inspection information that is in a form defined by user defined tags. The converted defect inspection information is transmitted through a network to a defect source identifier server. Defect source information is derived at the defect source identifier server in response to the converted defect inspection information.
Inventors:
DOR AMOS
RADZINSKI MAYA
RADZINSKI MAYA
Application Number:
PCT/US2001/031017
Publication Date:
June 13, 2002
Filing Date:
October 02, 2001
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
International Classes:
H01L21/66; (IPC1-7): G01N21/95; H01L21/66
Domestic Patent References:
| WO1999059200A1 | 1999-11-18 |
Foreign References:
| EP0910123A1 | 1999-04-21 | |||
| US5761064A | 1998-06-02 |
Other References:
See also references of EP 1247296A2
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