Title:
METHOD AND APPARATUS FOR DETECTING CONCAVE CYLINDRICAL SURFACES AND CYLINDRICAL DIVERGING LENSES
Document Type and Number:
WIPO Patent Application WO/2018/000943
Kind Code:
A1
Abstract:
The present invention relates to the technical field of optical instrument detection, in particular to a method for detecting shapes of cylindrical surfaces in a non-contact interference manner. Disclosed are a method and apparatus for detecting concave cylindrical surfaces and cylindrical diverging lenses. In the present technical solution, a cylindrical converging lens (4) and a cylindrical diverging lens (3) are respectively combined with a cylindrical surface to be tested (1); combined wave surface error data of the cylindrical diverging lens (3) and the cylindrical surface to be tested (1), as well as combined wave surface error data of the cylindrical converging lens (4) and the cylindrical surface to be tested (1) are obtained by means of interference measurement, and then the combined wave surface error data of the cylindrical diverging lens (3) and the cylindrical converging lens (4) are obtained by means of interference measurement; surface shape error data of the cylindrical surface to be tested (1), the cylindrical diverging lens (3) and the cylindrical converging lens (4) are respectively obtained by using a difference algorithm and a wave surface restoration algorithm. According to the present invention, the detection light path is simple, and high-precision surface shape detection of cylindrical surfaces is made possible without using high-precision and high-measurement performance gauges. The method and apparatus are especially applicable to cylindrical surface processing in the optical processing field.
Inventors:
GUO PEIJI (CN)
CHEN XI (CN)
FAN JIANBIN (CN)
CHEN XI (CN)
FAN JIANBIN (CN)
Application Number:
PCT/CN2017/083634
Publication Date:
January 04, 2018
Filing Date:
May 09, 2017
Export Citation:
Assignee:
ZHANGJIAGANG INST IND TECH SOOCHOW UNIV (CN)
International Classes:
G01B11/24
Foreign References:
| CN105890543A | 2016-08-24 | |||
| CN106197311A | 2016-12-07 | |||
| CN105318843A | 2016-02-10 | |||
| CN103175486A | 2013-06-26 | |||
| CN103196387A | 2013-07-10 | |||
| CN103994731A | 2014-08-20 | |||
| CN203657756U | 2014-06-18 | |||
| US5559767A | 1996-09-24 |
Attorney, Agent or Firm:
WUXI HUICHENGYONGXIN PATENT FIRM (GENERAL PARTNERSHIP) (CN)
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