Title:
METHOD AND APPARATUS FOR DETERMINING CONSUMABLE LIFETIME
Document Type and Number:
WIPO Patent Application WO2004061888
Kind Code:
A3
Abstract:
A plasma processing device (100) comprising a gas injection system (101) is described, wherein the gas injection system comprises a gas injection assembly body (210), a consumable gas inject plate (212) coupled to the gas injection assembly body (210), and a pressure sensor (220) coupled to a gas injection plenum (216) formed by the gas injection system (101) body and the consumable gas inject plate (212). The gas injection system (101) is configured to receive a process gas from at least one mass flow controller (114) and distribute the process gas to the processing region (115) within the plasma processing device (100), and the pressure sensor (220) is configured to measure a gas injection pressure within the gas injection plenum (216). A controller (114), coupled to the pressure sensor (220), is configured to receive a signal from the pressure sensor (220) and to determine a state of the consumable gas inject plate (212) based upon the signal. A method of determining the state of the consumable gas inject plate (212) comprises: measuring a change in the gas injection pressure associated with either a change in the process gas mass flow rate or the processing pressure; determining a response time for the change in pressure; and comparing the response time during erosion to a response time during no erosion.
Inventors:
STRANG ERIC J (US)
Application Number:
PCT/US2003/037092
Publication Date:
October 21, 2004
Filing Date:
December 19, 2003
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
STRANG ERIC J (US)
STRANG ERIC J (US)
International Classes:
H01J37/32; (IPC1-7): C23C16/50; C23C16/509; C23F1/00; H01L21/306
Foreign References:
| US5350480A | 1994-09-27 |
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