Title:
METHOD AND APPARATUS FOR DRIVING PIEZOELECTRIC DEVICE, AND CONTROLLER OF MACROMANIPULATOR
Document Type and Number:
WIPO Patent Application WO/2004/081684
Kind Code:
A1
Abstract:
An approximation formula is prepared for representing the relation of an amplitude ($g(D)V) within a range of voltage to be applied to a piezoelectric device (1), a reference voltage (Vo) relating to the voltage range, and the strain (G) per unit voltage of the piezoelectric device, and a target strain ($g(D)X) and the reference voltage (Vo) are inputted. The amplitude ($g(D)V) in the range of voltage for generating a target strain at the reference voltage is determined using the approximation formula, and a range (Vmin to Vmax) of voltage for generating the target strain is determined from the range of voltage thus determined and from the inputted reference voltage. A voltage is applied to the piezoelectric device on the basis of the voltage range thus determined, so that a precise strain can be generated without using any special strain measuring instrument. An approximation formula utilizing a linear or quadratic equation is prepared as the approximation formula in accordance with required accuracy.
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Inventors:
TAKADA RYUJI (JP)
HAZAKI EIICHI (JP)
HAZAKI EIICHI (JP)
Application Number:
PCT/JP1992/001569
Publication Date:
September 23, 2004
Filing Date:
November 30, 1992
Export Citation:
Assignee:
TAKADA RYUJI (JP)
HAZAKI EIICHI (JP)
HAZAKI EIICHI (JP)
International Classes:
H01L41/04; (IPC1-7): G05D3/00
Foreign References:
| JPS5533295A | 1980-03-08 | |||
| JPS63310378A | 1988-12-19 | |||
| JPS5884304A | 1983-05-20 |
Attorney, Agent or Firm:
Kasuga, Yuzuru (Shinkodenmacho 1-3, Nihonbashi-Kodenmach, Chuo-ku Tokyo 103, JP)
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