Title:
METHOD AND APPARATUS FOR FORMING A THIN FILM ON A TAPE SUBSTRATE
Document Type and Number:
WIPO Patent Application WO2004012277
Kind Code:
A3
Abstract:
The invention continuously deposits materials used to grow a thin film onto a moving tape. The invention preferably uses a pay-out reel (401) and take-up reel (406) to respectively dispense and spool the tape substrate (408) at a constant rate. The invention preferably uses a series of stages to form the thin film on the tape, and includes at least one reactor or reaction chamber (601c) to deposit one or more materials onto the tape substrate that is used to form the superconductor layer, and one or more chambers (601a, 601b) to deposit buffer layers between the film and the metal tape substrate or between layers of film, as well as for the deposition of coating layers. The invention also preferably uses transition chambers (701) between the stages to isolate each stage from the other stages.
Inventors:
IGNATIEV ALEX
ZHANG XIN
ZENG JIAN MING
LIU JIASHU
CHOU PENCHU
CASTELLANI LOUIS D
ZHANG XIN
ZENG JIAN MING
LIU JIASHU
CHOU PENCHU
CASTELLANI LOUIS D
Application Number:
PCT/US2003/022797
Publication Date:
September 30, 2004
Filing Date:
July 23, 2003
Export Citation:
Assignee:
METAL OXIDE TECHNOLOGIES INC (US)
International Classes:
C23C16/40; C23C16/54; H01L39/24; (IPC1-7): H01L39/24; C23C16/54
Foreign References:
| EP0744474A1 | 1996-11-27 | |||
| GB2117800A | 1983-10-19 | |||
| GB2272911A | 1994-06-01 |
Other References:
CUI X ET AL: "Continuous growth of epitaxial CeO2 buffer layers on rolled Ni tapes by electron beam evaporation", PHYSICA C, vol. 316, no. 1-2, 1 May 1999 (1999-05-01), pages 27 - 33, XP004173023, ISSN: 0921-4534
Download PDF: