Title:
METHOD AND APPARATUS FOR IN SITU DEPOSITING OF NEUTRAL CS UNDER ULTRA-HIGH VACUUM TO ANALYTICAL ENDS
Document Type and Number:
WIPO Patent Application WO2004038395
Kind Code:
A3
Abstract:
The present invention relates to a method for modifying the electronic properties of a surface to analytical ends, such as SIMS or electron spectroscopy, characterised in that it comprises in situ deposition of pure neutral cesium (Cs<0>), under ultra-high vacuum, said neutral cesium being enabled in the form of a collimated adjustable stream. The invention relates also to the special column designed for implementing the method and to the corresponding energy and/or mass analyser instrument.
Inventors:
MIGEON HENRI-NOEL (LU)
WIRTZ TOM (LU)
WIRTZ TOM (LU)
Application Number:
PCT/EP2003/012074
Publication Date:
October 07, 2004
Filing Date:
October 24, 2003
Export Citation:
Assignee:
CT DE RECH PUBLIC GABRIEL LIPP (LU)
MIGEON HENRI-NOEL (LU)
WIRTZ TOM (LU)
MIGEON HENRI-NOEL (LU)
WIRTZ TOM (LU)
International Classes:
G01N23/225; (IPC1-7): G01N23/225
Foreign References:
| US2972115A | 1961-02-14 | |||
| GB1315647A | 1973-05-02 |
Other References:
T. WIRTZ, B. DUEZ, H. -N. MIGEON, H. SCHERRER: "Useful yields of MCs+ and MCs2+ clusters: acomparative study between the Cameca IMS 4f and the Cation Mass Spectrometer", INTERNATIONAL JOURNAL OF MASS SPECTROMETRY, vol. 209, 2001, pages 57 - 67, XP001197305
T. MOOTZ, B. RASSER, P. SUDRAUD, E. NIEHUIS, T. WIRTZ, W. BIECK, H.-N. MIGEON: "Cation Mass Spectrometer: an Instrument Dedicazed to the Analysis of MCs+ Clusters. Description of the Instrument and Preliminary Result", 2000, PROCEEDINGS OF THE 12TH INTERNATIONAL CONFERENCE ON SECONDARY ION MASS SPECTROMETRY, ELSEVIER, AMSTERDAM, XP008032791
M. KAMARATOS: "Adsorption kinetics of the Cs-O activation layer on GaAs(100)", APPLIED SURFACE SCIENCE, vol. 185, 2001, pages 66 - 71, XP002288601
T. MOOTZ, B. RASSER, P. SUDRAUD, E. NIEHUIS, T. WIRTZ, W. BIECK, H.-N. MIGEON: "Cation Mass Spectrometer: an Instrument Dedicazed to the Analysis of MCs+ Clusters. Description of the Instrument and Preliminary Result", 2000, PROCEEDINGS OF THE 12TH INTERNATIONAL CONFERENCE ON SECONDARY ION MASS SPECTROMETRY, ELSEVIER, AMSTERDAM, XP008032791
M. KAMARATOS: "Adsorption kinetics of the Cs-O activation layer on GaAs(100)", APPLIED SURFACE SCIENCE, vol. 185, 2001, pages 66 - 71, XP002288601
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