Title:
METHOD AND APPARATUS FOR INDUCING TURBULENT FLOW OF A PROCESSING CHAMBER CLEANING GAS
Document Type and Number:
WIPO Patent Application WO/2011/159615
Kind Code:
A3
Abstract:
Embodiments of the invention generally relate to apparatus and methods for cleaning chamber components using a cleaning plate. The cleaning plate is adapted to be positioned on a substrate support during a cleaning process, and includes a plurality of turbulence-inducing structures. The turbulence-inducing structures induce a turbulent flow of cleaning gas while the cleaning plate is rotated during a cleaning process. The cleaning plate increases the retention time of the cleaning gas near the showerhead during cleaning. Additionally, the cleaning plate reduces concentration gradients within the cleaning plate to provide a more effective clean. The method includes positioning a cleaning plate adjacent to a showerhead, and introducing cleaning gas to the space between the showerhead and the cleaning plate. A material deposited on the surface of the showerhead is then heated and vaporized in the presence of the cleaning gas, and then exhausted from the processing chamber.
Inventors:
CHUNG HUA (US)
DONG XIZI (US)
MAUNG KYAWWIN (US)
HANAWA HIROJI (US)
KANG SANG WON (US)
QUACH DAVID H (US)
OLGADO DONALD J K (US)
BOUR DAVID (US)
HSU WEI-YUNG (US)
TAM ALEXANDER (US)
CHANG ANZHONG (US)
ACHARYA SUMEDH (IN)
DONG XIZI (US)
MAUNG KYAWWIN (US)
HANAWA HIROJI (US)
KANG SANG WON (US)
QUACH DAVID H (US)
OLGADO DONALD J K (US)
BOUR DAVID (US)
HSU WEI-YUNG (US)
TAM ALEXANDER (US)
CHANG ANZHONG (US)
ACHARYA SUMEDH (IN)
Application Number:
PCT/US2011/040197
Publication Date:
April 19, 2012
Filing Date:
June 13, 2011
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
CHUNG HUA (US)
DONG XIZI (US)
MAUNG KYAWWIN (US)
HANAWA HIROJI (US)
KANG SANG WON (US)
QUACH DAVID H (US)
OLGADO DONALD J K (US)
BOUR DAVID (US)
HSU WEI-YUNG (US)
TAM ALEXANDER (US)
CHANG ANZHONG (US)
ACHARYA SUMEDH (IN)
CHUNG HUA (US)
DONG XIZI (US)
MAUNG KYAWWIN (US)
HANAWA HIROJI (US)
KANG SANG WON (US)
QUACH DAVID H (US)
OLGADO DONALD J K (US)
BOUR DAVID (US)
HSU WEI-YUNG (US)
TAM ALEXANDER (US)
CHANG ANZHONG (US)
ACHARYA SUMEDH (IN)
International Classes:
H01L21/205; H01L21/302
Foreign References:
| US6277235B1 | 2001-08-21 | |||
| US7431772B2 | 2008-10-07 | |||
| US20020020429A1 | 2002-02-21 | |||
| JP2005072291A | 2005-03-17 |
Attorney, Agent or Firm:
TACKETT, Keith, M. et al. (L.L.P.3040 Post Oak Blvd., Suite 150, Houston Texas, US)
Download PDF:
Previous Patent: HIGHLY COLLIMATING REFLECTOR LENS OPTIC AND LIGHT EMITTING DIODES
Next Patent: CUP INSULATOR AND CUSTOMIZABLE INSERT
Next Patent: CUP INSULATOR AND CUSTOMIZABLE INSERT