Title:
METHOD AND APPARATUS FOR MAKING CONTINUOUS FILMS OFA SINGLE CRYSTAL MATERIAL
Document Type and Number:
WIPO Patent Application WO2004073024
Kind Code:
A3
Abstract:
A method for making continuous film of single crystal material by crystal deposition. The method includes providing a single crystal template ribbon formed as a continuous loop; epitaxially depositing a sacrificial layer on the single crystal template ribbon by passing the single crystal template ribbon through a first process chamber; passing the single crystal template ribbon with the sacrificial layer epitaxially deposited thereon through a second processing chamber, wherein a final layer including a single crystal material is epitaxially deposited thereon; and passing the single crystal template ribbon with the sacrificial layer and the final layer epitaxially deposited thereon through a third processing chamber, thereby removing the sacrificial layer and detaching the final layer, which is the continuous film of a single crystal material.
More Like This:
Inventors:
CHASON ERIC
BRIANT CLYDE L
BRIANT CLYDE L
Application Number:
PCT/US2004/003125
Publication Date:
December 29, 2004
Filing Date:
February 04, 2004
Export Citation:
Assignee:
UNIV BROWN (US)
International Classes:
B05D5/12; B23P19/00; C23C8/00; C30B23/00; C30B25/00; C30B25/02; C30B25/18; C30B28/12; C30B28/14; C30B29/02; C30B29/60; H01B12/00; H01L39/00; H01L39/24; H01L; (IPC1-7): H01L39/24; H01L39/00; B23P19/00; C30B23/00; C30B25/00; C30B28/12; C30B28/14; B05D5/12; H01B12/00; C23C8/00
Foreign References:
| US4419178A | 1983-12-06 | |||
| US6426320B1 | 2002-07-30 | |||
| US4663829A | 1987-05-12 |
Download PDF: