METHOD AND APPARATUS FOR MANUFACTURING DISPLAY DEVICE

WIPO Patent Application WO/2019/167122

A1

A method for manufacturing a display device according to the present inveniton comprises a step for placing an object to be treated in a treatment chamber in a housing, and a step for treating the object to be treated in the treatment chamber. The housing has an opening surrounded by a frame. In the step for treating the object to be treated, the opening is closed by a lid in a state in which the lid and the frame overlap. The frame and the lid are provided such that a double seal structure is formed between the frame and the lid when the opening is closed by the lid. The double seal structure has an annular inner seal member provided so as to surround the opening, and an annular outer seal member provided so as to surround the inner seal member, and is provided so that a gas flow path is formed in the space surrounded by the inner seal member, outer seal member, frame, and lid. The gas flow path is connected to at least one gas inlet and at least one gas outlet. The step for treating the object to be treated is performed while scavenging the gas in the gas flow path by causing the gas flowing from the gas inlet into the gas flow path to flow in the gas flow path and discharging the gas from the gas outlet.

KONDOH NOBUHIRO

PCT/JP2018/007248

September 06, 2019

February 27, 2018

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SHARP KK (JP)

G09F9/00

WO2008018545A1

2008-02-14

JP2003077678A	2003-03-14
JP2001015440A	2001-01-19
JP2003309266A	2003-10-31
JP2006124792A	2006-05-18
US20050061994A1	2005-03-24

NOGAWA, Shintaro et al. (JP)

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