METHOD AND APPARATUS FOR MANUFACTURING ORGANIC EL ELEMENT

WIPO Patent Application WO/2012/090587

A1

A method for manufacturing an organic EL element which comprises a vapor deposition process wherein an organic layer is formed on an electrode layer-side surface of a base by ejecting a vaporized organic layer-forming material from a nozzle of a vapor deposition source, while supplying and moving the base with the non-electrode-side surface thereof being in contact with the surface of a rotary driven can roll. In the method for manufacturing an organic EL element, a distance measuring unit which is capable of measuring a first distance that is the distance to the base supported by the can roll and a position adjusting unit which is capable of adjusting a second distance that is the distance between the nozzle of the vapor deposition source and the surface of the base are used, and the vapor deposition process is carried out while controlling the second distance to be constant by means of the position adjusting unit based on the measurement results for the first distance by the distance measuring unit.

MORITA SHIGENORI (JP)
KAKIUCHI RYOHEI (JP)
NAGASE JUNICHI (JP)
NEGISHI NOBUKAZU (JP)
NAKAI TAKAHIRO (JP)
ICHIEDA NAOKO (JP)
WATANABE MASAHIKO (JP)

PCT/JP2011/075494

July 05, 2012

November 04, 2011

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NITTO DENKO CORP (JP)
MORITA SHIGENORI (JP)
KAKIUCHI RYOHEI (JP)
NAGASE JUNICHI (JP)
NEGISHI NOBUKAZU (JP)
NAKAI TAKAHIRO (JP)
ICHIEDA NAOKO (JP)
WATANABE MASAHIKO (JP)

H05B33/10; C23C14/24; H01L51/50

WO2009157154A1	2009-12-30
WO2006100868A1	2006-09-28

JP2008287996A	2008-11-27
JP2003042299A	2003-02-13

FUJIMOTO, NOBORU (JP)
Noboru Fujimoto (JP)

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