Title:
METHOD AND APPARATUS FOR MANUFACTURING THIN FILM
Document Type and Number:
WIPO Patent Application WO/2011/126039
Kind Code:
A1
Abstract:
Disclosed is a method for manufacturing a thin film having a high film density using a spray film-forming method.
The method for manufacturing a thin film sequentially includes: step of forming liquid droplets by spraying a raw material liquid, which has a solute dissolved and/or diffused in a solvent; a step of volatilizing and condensing the solvent in the liquid droplets; and a step of depositing the condensed liquid droplets on a substrate or on a thin film provided on the substrate. The method is characterized in depositing, at the same time on the substrate, the liquid droplets having liquid droplet diameters different from each other.
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Inventors:
OKI Kazuhiro (577 Ushijima, Kaisei-machi, Ashigarakami-gu, Kanagawa 77, 〒2588577, JP)
沖 和宏 (〒77 神奈川県足柄上郡開成町牛島577番地 富士フイルム株式会社内 Kanagawa, 〒2588577, JP)
沖 和宏 (〒77 神奈川県足柄上郡開成町牛島577番地 富士フイルム株式会社内 Kanagawa, 〒2588577, JP)
Application Number:
JP2011/058680
Publication Date:
October 13, 2011
Filing Date:
April 06, 2011
Export Citation:
Assignee:
FUJIFILM CORPORATION (26-30, Nishiazabu 2-chome Minato-k, Tokyo 31, 〒1060031, JP)
富士フイルム株式会社 (〒31 東京都港区西麻布2丁目26番30号 Tokyo, 〒1060031, JP)
OKI Kazuhiro (577 Ushijima, Kaisei-machi, Ashigarakami-gu, Kanagawa 77, 〒2588577, JP)
富士フイルム株式会社 (〒31 東京都港区西麻布2丁目26番30号 Tokyo, 〒1060031, JP)
OKI Kazuhiro (577 Ushijima, Kaisei-machi, Ashigarakami-gu, Kanagawa 77, 〒2588577, JP)
International Classes:
B05D1/02; B05B13/00; H01L51/50; H05B33/10
Attorney, Agent or Firm:
SIKs & Co. (8th Floor, Kyobashi-Nisshoku Bldg. 8-7, Kyobashi 1-chome, Chuo-k, Tokyo 31, 〒1040031, JP)
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Claims:
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