Title:
METHOD AND APPARATUS FOR MEASURING SHAPE OF SURFACE TO BE INSPECTED, AND METHOD FOR MANUFACTURING OPTICAL ELEMENT
Document Type and Number:
WIPO Patent Application WO/2012/008031
Kind Code:
A1
Abstract:
Provided is a measuring method or measuring apparatus, wherein a time needed to measure the whole shape of a surface to be inspected can be shortened. A plurality of measuring ranges are respectively set such that, with a part of the surface to be inspected as one measuring range, each measuring range forms an overlapping region with at least a part of one other measuring range. Then, the shape of the surface to be inspected is measured with first resolution within a first measuring range among the measuring ranges, and is measured with second resolution within a second measuring range. Using the measurement data, the shape of the surface to be inspected is calculated by combining the data of the shapes of the surfaces within the measuring ranges.
Inventors:
OSAKI Yumiko (C/O CANON KABUSHIKI KAISHA, 30-2 Shimomaruko 3-chome, Ohta-k, Tokyo 01, 〒1468501, JP)
Application Number:
JP2010/061940
Publication Date:
January 19, 2012
Filing Date:
July 15, 2010
Export Citation:
Assignee:
CANON KABUSHIKI KAISHA (30-2, Shimomaruko 3-chome Ohta-k, Tokyo 01, 〒1468501, JP)
キヤノン株式会社 (〒01 東京都大田区下丸子３丁目３０番２号 Tokyo, 〒1468501, JP)
キヤノン株式会社 (〒01 東京都大田区下丸子３丁目３０番２号 Tokyo, 〒1468501, JP)
International Classes:
G01B11/24; G01J9/02; G01M11/00
Attorney, Agent or Firm:
ABE Takuma et al. (C/O CANON KABUSHIKI KAISHA, 30-2 Shimomaruko 3-chome, Ohta-k, Tokyo 01, 〒1468501, JP)
Claims:
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