MEIHOD AND APPARAIUS FOR PERFORMING CIIEMICAL ANALYSIS USING IMAGING BY SCANNING THERMAL MICROSCOPY The present application is a continuation-in-part of US. Patent Application No.08/837,547 (the "Parent Application"), filed April 22,1997, which is hereby incorporated by reference in its entirety. The present application also claims the benefit of US. Provisional Application No. 60/033,959 (the "ProvisionaI Application"), ffled December 31,1996.

BACKGROUND Field of the Invention The present invention relates to analyzing the chemical nature of materials. More particularly, the present invention relates to sub-micron analysis of chemical properties of a sample material at a particular location of interest by decomposing, desorbing or ablating a small portion of the sample material and transferring the small portion to a chemical analyzer.

Background of the Invention.

A conventional method for imaging the chemical nature of polymeric systems is imaging Secondary Ion Mass Spectroscopy (SIMS). In imaging SIMS, the surface af a sample is bombarded by a beam of ions (usually argon) that is rastered over the surface The ions cause material on the surface of the sample to be ejected and ionized These secondary ions are swept into a mass spectrometer for analysis. SIMS is a very expensive technique that is not easily applicable to insulating samples such as polymers. This is because a charge that builds on the surface of insulating polymer samples deflects the incident ion beam. Although this can be overcome in some cases by bathing the insulating polymer sample with electrons, a great deal of expertise is required to obtain satisfactory results. A further limitation of SIMS is that the sample must be analyzed under high vacuum It would be desirable in many cases to analyze samples at or above atmospheric pressure or submerged in a substance, for example water.

Another problem with SIMS is that is a continuously destructive imaging technique As described above, the bombardment of the material by the ion beam causes the surface material to be heated, thereby destroying the surface. It would be advantageous to have an imaging system which can image the topology and thennal properties of the material without destroying the surface. It is also desirable to be able to study the material after any damage is done as a result of desorption or pyrolysis.

Neither kind of study can be performed using conventional SIMS techniques.

SUMMARY OF THE INVINITON The present invention allows chemical studies to be performed on the surface and subsurface of a material. An image of a sample material is created using any conventional sample imaging technique. Using the image, an area of the sample on which to perform analysis is determined. An activation device is positioned at the selected area of interest. The activation device is activated to cause a portion of the sample to be emitted. The emitted portion of the sample is collected and analyzed to determine its chemical properties. The present invention can be used below, at or above atmospheric pressure or submerged in a substance, for example, water.

In a preferred embodiment of the present invention, the activation device is a highly miniaturized resistive probe as described below. In the preferred embodiment, an image of the sample is created using the probe. Using the resulting image, the probe is positioned at a desired location on the surface. Using a selected heating mode, the probe is heated to cause a portion of the sample to decompose or desorb into a gaseous form. The evolved gas is swept into a heated capillary tube, which is positioned close to the probe. The heated capillary tube is connected to a chemical analyzer1 which analyzes the evolved gases. The area from which the material was decomposed or desorbed can further be rescanned to assess the volume ablated.

The process is then repeated for another selected area.

The process can be placed under computer control. Using a computer the selected area can be scanned. Further, either an operator or the computer can select areas for analysis.

Objects of the Invention A first object of the present invention is to provide submicron imaging and chemical analysis over a wide-variety of atmospheric pressures, induding at or above atmospheric pressure, under a vacuum, and submerged under a substance, for example, water.

Another object of the present invention is to image a sample topology and thermal properties in a nond1ructive manner, in addition to obtaining infonnation using pyrolysis and desorption.

Another object of the present invention is to reduce the problems associated with imaging insulators such as polymers.

Another object of the present invention is to provide precise temperature control to increase the resolution of chemical species analysis.

Another object of the present invention is to reduce the cost of conventional sub-micron imaging.

These and other objects af the present invention are described in greater detail in the detailed description of the invention, the appended drawings and the attached claims.

DEEERIIMON OF THE DRAWINGS Figure 1 is a schematic diagram of a submicron chemical analysis system according to a preferred embodiment of the present invention.

Figure 2 is a flow chart for analyzing a sample according to a preferred embodiment of the present invention.

DETAILED DESCRIPITON OF THE INVENTION A preferred embodiment of the present invention is illustrated schematically in Figure 1. In the preferred embodiment, a computer 102 is operatively coupled to a scanning thermal microscope (six) system 104. SDI 104 includes a probe 106, which is used to analyze local thermal properties at a location 107 of a sample 108, placed on a stage 110 of SIM 104. According to the preferred embodiment, a heated capillary tube 112 is placed in close proximity to location 107 to collect evolved gases 114 that result from heating location 107 according to the present invention. In the preferred embodiment, evolved gases 114 are analyzed for their chemical composition by a gas chromatograph 115 and/or a mass spectrometer 116.

STM 104 is preferably the Explorer scanning probe microscope (SPM) manufactured by the Topometrix Corporation, located in Santa Clara, California. Probe 106 is preferably a thermal resistive element that functions as both a heater and a sensor. Alternately, probe 106 is heated by a laser and the temperature sensed by a thermocouple. When operating as a heater a current proportional to the desired temperature is passed through probe 106. When operating as a sensor, the resistance of probe 106 varies in response to changes in temperature. A more detailed description of SIM 104 and probe 106 is presented in the Parent Application, which has been incorporated by reference herein in its entirety.

Probe l06 can be used as a highly localized heat source as well as a detector. When heated by the passage of an electric current through the resistive portion of probe 106, its contact with the sample acts as a point-like heat source.

Therefore, no other means of sample heating, such as a laser, is required. The probe 106 is attached to a scanning mechanism1 and is controlled to obtain thermo image contrast that corresponds to variations in either thermal conductivity (using DC imaging) or thermal diffusivity (using AC imaging).

fri the preferred embodiment, computer 102 controls the position and the temperature of probe 106, by executing a probe control process 118. Thus, the scanning mechanism in the preferred embodiment is computer 102. Computer 102 executes a probe position process 120. Probe position process 120 sends commands to SIwM 104 to control the position of probe 106. This position control can simply be a command to probe 106 to move to a particular location, for example location 107. In addition, the position control can be complex so as to effectuate a scan or raster of a particular area of interest. Programming computer 102 to perform the functions described herein for probe position process 120 is well-know to those skilled in the art.

Computer 102 also executes a heating program process 122, which sends probe control commands to probe 106 to cause it to heat according to a selected or calculated temperature program. The temperature program can be selected or chosen in a number of well-known ways. For example, the temperature program can be selected by choosing the exact parameters that describe the temperature program.

Alternately, the temperature program can be entered by parameters that are then used to calculate the desired temperature program. Programming computer 102 to perform the functions described herein performed by heating control process 122 is well-known to those skilled in the art.

Several methods for causing probe 106 to generate the desired temperature program can be used with the present invention. In the preferred embodiment, computer 102 sends probe control commands to SIM 104 in a well-known manner over an interface 118. SIM 104 receives the probe control commands and causes a current to flow through probe 106 to generate the requested temperature program According to the preferred embodiment of the present invention, a particular location, for example location 107, on sample 108 at which to perform a localized thermal analysis is selected by first obtaining a thermal and/or topographic image of the sample. The thermal and/or topographic image can be obtained by any of the techniques disclosed in the Parent Application, or any other technique. Using the thermal and/or topographic image, the particular location is selected.

In the preferred embodiment, selection is perfonned using a pointing device 126. For example, pointing device 126 can be a conventional mouse device controlled by mouse control software 128 executing on computer 102. Preferably, the thermal and/or topographic image is generated on a display device 130. Referring to Figure 1, a thermal image 132 of sample 108 is illustrated on display device 130.

Display device 130 can be any of a number of well-known cathode ray tube (CRT) devices that can be coupled to computer 102. Once the area is selected, probe position process 120, executing on computer 102, converts the selected location to probe position control commands. Probe position process 120 sends the probe position control commands to SI1!4 104 to cause probe 106 to be positioned at location 107. Probe 106 is preferably placed approximately a micron above the surface of sample 108 at location 107.

Once probe 106 is located at the position 107, probe position process 120 places probe 106 on the surface of sample 108. Preferably, this is accomplished by placing the probe in contact with the surface of sample 108 at location 107 and applying a known force to probe 106 to maintain contact with the surface of sample 108. Sample 108 is then heated by heating probe 106. Preferably, sample 108 is heated by applying one of the heating modes described below to probe 106. Alternately, probe 106 can be placed at a known distance above the surface of sample 108. Sample 108 would then be heated, preferably by applying one of the heating modes described below to probe 106.

When probe 106 is properly positioned at location 107, a heating mode is selected to cause probe 106 to heat sample 108 at location 107. The heating modes are selectable or can be pre-selected, as by choosing one mode to be a default mode. There are several heating modes available in the preferred embodiment a) Temperature Ramp Mode: Probe 106 is placed on the area of interest and its temperature ramped. Adsorbed material is driven off at low temperatures. Then decomposition products are generated at higher temperatures.

b) Heat Pulse mode: Probe 106 is heated to some temperature above the normal decomposition or desorption temperature for sample 108. Probe 106 is then briefly placed on the surface of sample 108. Desorption and decomposition products are generated. The amount of time that probe 106 remains in contact with the surface of sample 108 can be used to regulate the size of the region over which decomposition/desorption occurs. The heat pulse mode is altemately referred to as a tapping mode.

That is the hot probe 106 is tapped on the surface of sample 108 to heat it.

c) Transfer Mode: Probe 106 is deaned by heating to a high temperature.

Then probe 106 is alIowed to cool. Probe 106 is then placed on the surface of sample 108 and raised. Material from the surface of sample 108 is adsorbed onto the probe. The adsorbed material can then be desorbed by flash heating. The process can be repeated as required to obtain sufficient material for analysis. Because repetition may be required, this process is preferably automated. That is computer 102 controls the process of cleaning, cooling, lowering, raising and flash heating of probe 106.

An altemative technique for using the transfer mode is to coat the tip of probe 106 with a material that assists the adhesion of the surface material to probe 106. For example, probe 106 can be dipped in the requisite fluid. Any adhesion promoting or reactive fluid can be used. A reactive fluid chemically reacts with the surface of sample 108 to promote adhesion products. To assist drying, probe 106 is preferably warmed.

Probe 106 is then placed on the surface of sample 108. Surface material can adhere to the coating. Alternately, probe 106 can be warmed to assist the adhesion process. Probe 106 can then be cooled and raised. Then the adhesion products can be desorbed through flash heating. During chemical analysis, the decomposition products of the coating would be known, and therefore can be eliminated from the analysis. Alternately, the raised probe 106 can be moved to a different location where it is dipped into a transfer medium. The transfer medium dissolves the sample into a small dot of the new material. This product is then analyzed by any analytical technique, including conventional HFLC and electrophoresis. Using a coating that is not water-soluble, the transfer mode can be applied to a sample that is under water. Materials submerged in substance other than water can be studied by using a solvent-insoluble coating, or any coating not soluble by the substance in which the material is submerged. The particular coating that is used in the transfer mode can contain reactive species to obtain specific products.

d) Ballistic Mode: Probe 106 is heated to a commanded temperature very rapidly. The heating is uncontrolled, meaning that the temperature of the probe reaches the commanded temperature as rapidly as it can.

e) Scanning Mode: An area of the surface of sample 108 is selected for analysis, rather than a single point. Probe 106 is heated. The heated probe 106 is then rastered over the selected area of the surface of sample 108.

Material that is ablated from sample 108 is trapped and analyzed. The temperature of probe 106 and the speed of the raster are both controllable using computer 102 and probe control process 118. The temperature of probe 106 and the speed of the raster detennine the depth of the material that is ablated. For example, an area of 10 by 10 microns can be scanned with ablation occurring to 100 nanometers. This results in 10 cubic microns of ablated material. Preferably, the scanning mode is automatically controlled by computer 102. The scanning mode can also be combined with any heating mode (a) - (d) to heat probe 106.

The present invention is not limited to the above heating modes Other modes of heating to obtain the benefits of the present invention would be known to those skilled in the art. Further, in the preferred embodiment, it is the tip of probe 106 that is heated.

hi each of the heating modes, material is decomposed, desorbed or ablated for subsequent chemical analysis. Two methods of chemical analysis are used in the preferred embodiment: mass spectroscopy and gas chromatography. Both methods are well-known to those skilled in the art. There is a problem, however, associated with transferring the material to the analyzer, whether it is mass spectrometer 116 and/or gas chrornatograph 115. In the preferred embodiment, this problem is solved by using a heated capillary 112. The heated capillary 112 is positioned in close proximity to probe 116, so that desorbed, decomposed or ablated species are "sucked" into capillary tube as a result of a low pressure maintained on the other side. For example, the low pressure can be generated by connecting the other end of the capillary to the vacuum chamber 134 of the mass spectrometer 116. Once the evolved material 114 has entered mass spectlometer 116, its chemical properties are analyzed in a conventional manner. In this manner, the present invention allows sub micron study of the chemical properties of materials. Using the scanning method of heating described above, the present invention allows submicron chemical imaging of a sample.

The heating modes described above provide a high degree of control of the surface selectivity. The transfer mode provides information very near the surface, including the top monolayer in many cases. The temperature scanning and heat pulse modes can sample tens, and even hundreds, of microns below the surface. If an isolated partide is the object of interest, whether lying on, or buried below within a matrix withone side exposed, then the entire partide can be volatilized to ensure a good analysis with high signal to noise ratio.

As described above, the scanning mode can be combined with any of the other modes as probe 106 is rastered along the selected analysis area in two dimensions.

For example, by combining the heat pulse mode and the scanning mode, probe 106 is effectively tapped on the surface of material 108 as it is rastered in two dimensions. The resulting series of gases can be analyzed by mass spectrometer 116, thus building up a chemical map of the surface of sample 108. That is, acquisition of gases is coordinated with the position in the image that is being generated.

To provide additional information a gas chromatograph 115 is added to the sub-micron chemical analysis system of the present invention. In the preferred embodiment, gas chromatograph 115 is interposed between heated capillary 112 and mass spectrometer 116, as illustrated schematically in Figure 1. In this manner, the evolved material can be chemically analyzed by gas chromatography using gas chromatograph 115.

Using computer 102, the foregoing analyses can be automated.

Preferably, areas of interest for analysis are pre-selected. This can be done by pre- selecting multiple areas on using a thermal image, such as thermal image 132.

Alternately, computer 102 can select the areas of interest, for example, by using a random number generator. In addition, the heating mode is selected. This can be done by selecting the heating program Alternately, computer 102 can select the heating mode. For example, heating control process 122, executing on computer 102, can select a default heating mode. After the selection is made, probe position process 120 causes the probe to automatically go to the first selected area. Heating mode process 122 sends appropriate probe control commandos to STM 104 to cause probe 106 to heat the selected area according to the selected heating mode. The evolved gases are transferred into the analyzer through capillary 112, where their chemical nature is analyzed. After the analysis, probe position process 120 automatically causes probe 106 to move to the second pre-selected area, and the process repeats. This is done for all selected areas designated in the automatic analysis. In the automatic mode of operation different heating programs can be selected for different areas of the sample 108. For example, the first selected area can be heated according to the temperature ramp mode, while a second area can be analyzed using a scanning mode.

In some cases, it is desirable to trap the evolved gases 114 into a cryo-tap or an adsorbate (not shown). Subsequently, the material is flash desorbed and forwarded to the gas chromatograph and/or mass spectrometer for analysis.

Capillary tube 112 can be placed close to the sample by "eyeballing" the appropriate location However, other techniques can place capillary tube 112 more accurately. In the preferred embodiment, a hunt-seek type proximity detennination method is used to locate heated capillary tube 112 next to the tip of probe 106. One hunteeek method, for example, is to use an automated micro-positioner, such as is conventionally used in optical microscopy. In this method, probe 106 and heated capillary tube 112 are made to form two halves of a capacitor. Heated capillary tube 112 is initially located by eye. Then a capacitance signal generated by the two halves is used to bring capillary tube 112 closes to probe 106, but not to close.

To prevent, capillary tube 106 from being moved too close to probe 106, a threshold for the capacitance signal can be used. If the capacitance signal exceeds the threshold, capillary tube 112 is too close to probe 106. A second threshold can be used to determine whether capillary tube 112 is dose enough to probe 106. That is, if the capacitance signal is below the second threshold, then capillary tube 112 must be moved closer to probe 106. Thus, in effect a range is deternined for the capacitance signal. When the capacitance signal falls within that range, capillary tube 112 is properly positioned relative to probe 106.

An alternative huntieek method for properly positioning capillary tube 112 relative to probe 106 is to embed a temperature sensor 136 in capillary tube 112. As before a threshold range is determined. In this case the threshoIds correspond to temperatures. If the temperature sensed by temperature sensor 136 is too great, capillary tube 112 is too close to probe 106. If the temperature sensed by temperature sensor 136 is too small, capillary tube 112 is too far from probe 106.

Another alterative for properly positioning capillary tube 112 relative to probe 106 is to calibrate the micro-manipulator of STrvl 104 and probe 106 in the x, y and z planes. By so doing, probe 106 can be precisely positioned without the need for a feedback loop based on some form of proximity determination. By calibrating the micro-manipulator and probe 106 in this manner, probe 106 can be precisely positioned.

As a result, capillary tube 112 can be precisely positioned relative to probe 106's known position.

A preferred method for performing a process according to the present invention using the apparatus discussed above and illustrated in Figure 1 is shown by a flow chart in Figure Q In step 202 an image of a sample is obtained. As described above, this image can be obtained using any imaging technique, including thermal and photothermal imaging techniques. In step 204 an area of the image is selected for analysis. This selection can be by a user or performed automatically, for example, by computer 102. In step 2OS, probe 106 is positioned over the selected area. In the preferred embodiment, this is done by probe position process 120, and can use the proximity determination hunt-seek or calibration methods described above. A heating mode is then selected in step 208. Once again, the selection can be by a user or automatic, for example, by computer 102 using a default. In step 210 heated capillary tube 112 is positioned in proximity to probe 106 to collect material that evolves from sample 108 upon heating. The heating mode is initiated in step 212. In the preferred embodiment, the heating mode is controlled by heating control process 122 executing on computer 102. The material that evolves is collected in step 214. The collected material is analyzed in a chemical analyzer in step 216. In the preferred embodiment, the chemical analysis is performed by gas chromatograph 115 and/or mass spectrometer 116. In step 218, any desired post-processing is perfonned. For example, the sample 108 from which material evolved can be analyzed to assess the volume ablated, or to image the resulting crater. Steps 202-218 can be repeated at another location if desired.

The foregoing disclosure of examples and embodiments of the present invention has been presented for purposes of illustration and description It is not intended to be exhaustive or to limit the invention to the precise forms disclosed. Many variations and modifications of the embodiments described herein will be obvious to one of ordinary skill in the art in light of the above disclosure. The scope of the invention is to be defined only by the claims appended hereto, and by their equivalents.