METHOD AND APPARATUS FOR PROCESSING METAL BEARING GASES

Title:

METHOD AND APPARATUS FOR PROCESSING METAL BEARING GASES

Document Type and Number:

WIPO Patent Application WO2006078340

Kind Code:

A3

Abstract:

A method and apparatus for processing metal bearing gases involves generating a toroidal plasma in a plasma chamber. A metal bearing gas is introduced into the plasma chamber to react with the toroidal plasma. The interaction between the toroidal plasma and the metal bearing gas produces at least one of a metallic material, a metal oxide material or a metal nitride material.

More Like This:

JP4125443	Methods and Equipment for Removing Fine Particle Contamination in Tungsten Silicide Deposition Steps
JPH10209137	CLEANING SYSTEM FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT AND ITS CONTROL METHOD
JP5630319	How to engrave parts for plasma processing equipment and identification labels

Inventors:

HOLBER WILLIAM M (US)
SMITH JOHN (US)
CHEN XING (US)
SMITH DONALD (US)

Application Number:

PCT/US2005/040684

Publication Date:

September 08, 2006

Filing Date:

November 08, 2005

Export Citation:

Click for automatic bibliography generation Help

Assignee:

MKS INSTR INC (US)
HOLBER WILLIAM M (US)
SMITH JOHN (US)
CHEN XING (US)
SMITH DONALD (US)

International Classes:

C23C16/44; C23C16/452; H01J37/32

Foreign References:

US20040079287A1	2004-04-29
EP0291181A2	1988-11-17
US6041735A	2000-03-28
EP1145759A1	2001-10-17

Other References:

VAN HOORNICK N B H ET AL: "Recovery of tungsten from the exhaust of a tungsten chemical vapor deposition tool", JOURNAL OF THE ELECTROCHEMICAL SOCIETY ELECTROCHEM. SOC USA, vol. 147, no. 12, December 2000 (2000-12-01), pages 4665 - 4670, XP002386613, ISSN: 0013-4651

Download PDF:

View/Download PDF PDF Help

Previous Patent: SYSTEM AND METHOD FOR PRODUCING FOAMED AND STEAMED MILK FROM MILK CONCENTRATE

Next Patent: MODULAR SYSTEM AND APPARATUS FOR TESTING GAS DETECTORS