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Title:
METHOD AND APPARATUS FOR REMOVING HYDROGEN PEROXIDE
Document Type and Number:
WIPO Patent Application WO/2007/081054
Kind Code:
A1
Abstract:
A method of removing hydrogen peroxide from water, characterized by bringing hydrogen peroxide-containing raw water into contact with a hydrogen peroxide decomposition catalyst which comprises a support and, deposited thereon, nanocolloidal particles of a platinum-group metal having an average particle diameter of 1-50 nm. Also provided is an apparatus for removing hydrogen peroxide, characterized by comprising: a hydrogen peroxide decomposer packed with a catalyst which comprises a support and, deposited thereon, nanocolloidal particles of a platinum-group metal having an average particle diameter of 1-50 nm; a water supply means for supplying hydrogen peroxide-containing raw water to the decomposer; and a drainage means for discharging from the decomposer the water which has been contacted with the catalyst. By the method and apparatus, hydrogen peroxide contained in raw water can be rapidly removed without fail. They are suitable for removing hydrogen peroxide from ultrapure water in an apparatus for ultrapure water production which is used especially in an industry where electronic materials such as semiconductors and liquid crystals are handled.

Inventors:
KOBAYASHI HIDEKI (JP)
Application Number:
PCT/JP2007/050642
Publication Date:
July 19, 2007
Filing Date:
January 11, 2007
Export Citation:
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Assignee:
KURITA WATER IND LTD (JP)
KOBAYASHI HIDEKI (JP)
International Classes:
C02F1/58; B01D19/00; B01D61/00; B01J31/08; B01J35/02; C02F1/20
Domestic Patent References:
WO2005023467A12005-03-17
Foreign References:
JPH0824897A1996-01-30
JP2005199267A2005-07-28
JPH06254549A1994-09-13
JP2000015272A2000-01-18
Attorney, Agent or Firm:
UCHIYAMA, Mitsuru (4-1 Kandasudacho 1-chom, Chiyoda-ku Tokyo 41, JP)
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