METHOD AND APPARATUS FOR ROTATION OF A WORKPIECE IN SUPERCRITICAL FLUID SOLUTIONS FOR REMOVING PHOTO RESIST, RESIDUES AND PARTICLES THEREFROM

Title:

METHOD AND APPARATUS FOR ROTATION OF A WORKPIECE IN SUPERCRITICAL FLUID SOLUTIONS FOR REMOVING PHOTO RESIST, RESIDUES AND PARTICLES THEREFROM

Document Type and Number:

WIPO Patent Application WO2004090339

Kind Code:

A3

Abstract:

A supercritical fluid cleaning system uses process fluid for operating rotary motors in the chamber with fluid bearings and fluid load levitation for rotating workpieces and impellers. Rotating speed and direction sensors and a home position locator facilitate motor control. Impellers add further agitation of the fluid in the chamber, faster processing, and greater uniformity of supercritical fluid components and increase mass transfer of fluid to the processed surface. Centrifugal operated clips and cassettes hold wafers and impellers. Non-contact, fluid operated rotating mechanisms reduce contamination. Physical, rotational, and shear affects are enhanced through centrifugal forces which can induce the separation of films localized deposits or molecular products of the reaction from the surface. There is a concomitant agitation of fluid, and continuous angular acceleration imparted to the processed surface features.

More Like This:

WO/2006/125413	METHOD AND DEVICE FOR TREATING WORKPIECE SURFACES BY MEANS OF LASER BEAMS
WO/2005/086212	SEMICONDUCTOR DEVICE CLEANING MEMBER AND MANUFACTURING METHOD THEREOF
WO/2016/163004	CLEANING APPARATUS WITH CO2 RECYCLING AND OPERATION METHOD THEREFOR

Inventors:

POPE KEITH (US)
MOUNT DAVID J (US)
ROTHMAN LAURA (US)
WHITE RICK C (US)
BUSBY CLIFTON (US)
DOUGLAS STEPHEN B (US)
DOW III RAYMOND J (US)

Application Number:

PCT/US2004/010533

Publication Date:

September 29, 2005

Filing Date:

April 05, 2004

Export Citation:

Click for automatic bibliography generation Help

Assignee:

S C FLUIDS INC (US)
POPE KEITH (US)
MOUNT DAVID J (US)
ROTHMAN LAURA (US)
WHITE RICK C (US)
BUSBY CLIFTON (US)
DOUGLAS STEPHEN B (US)
DOW III RAYMOND J (US)

International Classes:

B08B7/00; H01L21/00; (IPC1-7): B08B7/04; B08B3/00; B08B7/00; B08B9/00

Foreign References:

DE19922195A1	2000-11-16
US20030047199A1	2003-03-13

Download PDF:

View/Download PDF PDF Help

Previous Patent: DYNAMIC SYSTEM FOR REFRIGERATION EQUIPMENT

Next Patent: FLUID PRESSURE CYLINDER AND SWING LEVER UNIT