Title:
METHOD AND APPARATUS FOR SCRIBING SILICON CARBIDE BOARD
Document Type and Number:
WIPO Patent Application WO/2012/093422
Kind Code:
A1
Abstract:
This apparatus for scribing a silicon carbide board is provided with: a horizontal table (3), which fixes a silicon carbide board (2) by vacuum suction; a feed screw (5) and a Y axis control motor (6), which move the table (3) along guide rails (4, 4) by controlling scribe numerical values; a guide rail device body (7), which is installed in the X axis direction above the table (3); a carriage (8), which is attached such that the carriage moves to the guide rail device body (7) by being guided in the X axis direction; a feed screw and an X axis control motor (9), which move, with numerical control, the carriage (8) in the X axis direction; and a scribe head (10), which is disposed on the carriage (8).
Inventors:
BANDO KAZUAKI (JP)
Application Number:
PCT/JP2011/000061
Publication Date:
July 12, 2012
Filing Date:
January 07, 2011
Export Citation:
Assignee:
BANDO KIKO CO (JP)
BANDO KAZUAKI (JP)
BANDO KAZUAKI (JP)
International Classes:
B24B27/06; B28D5/04
Domestic Patent References:
| WO2010116421A1 | 2010-10-14 |
Foreign References:
| JP2002252185A | 2002-09-06 | |||
| JP2002134437A | 2002-05-10 | |||
| JP2008168304A | 2008-07-24 | |||
| JP2003292332A | 2003-10-15 | |||
| JP2007320069A | 2007-12-13 | |||
| JPS58163615A | 1983-09-28 | |||
| JP2009248267A | 2009-10-29 |
Other References:
See also references of EP 2662186A4
Attorney, Agent or Firm:
TAKADA, TAKESHI (JP)
Takeshi Takada (JP)
Takeshi Takada (JP)
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Claims: