HÄGGBLOM MIKAEL (FI)
WO2020212552A1 | 2020-10-22 |
US20150005923A1 | 2015-01-01 | |||
CN210744995U | 2020-06-12 | |||
ES2315130A1 | 2009-03-16 |
CLAIMS 1. A surface processing apparatus (500), comprising: - a surface processing device (200) to process a surface (SRF1), - a robot (ROBO1) to move the surface processing device (200) with respect to the surface (SRF1), - an electromagnetic actuator (100) to electromagnetically apply an actuator force (F1) to the surface processing device (200), so as to cause the surface processing device (200) to press against the surface (SRF1) with a controlled pressing force (FSRF1), and - a control unit (CNT1) to control the pressing force (FSRF1) by adjusting an electric current (IC) of the electromagnetic actuator (100). 2. The apparatus (500) of claim 1, wherein the electromagnetic actuator (100) is a linear actuator. 3. The apparatus (500) of claim 2, wherein the electromagnetic actuator (100) comprises one or more linear guides (LIN1) to define a linear path of a mover (M1) of the actuator (100) with respect to a stator (M2) of the actuator (100). 4. The apparatus (500) of claim 2 or 3, wherein the electromagnetic actuator (100) comprises permanent magnets, which are arranged according to the Halbach array configuration. 5. The apparatus (500) according to any of claims 2 to 4, wherein the electromagnetic actuator (100) is gearless. 6. The apparatus (500) according to any of the claims 1 to 5, further comprising a position sensor (PSEN1) to form a position signal (SZ) indicative of a displacement ( ΔzM1) of a mover (M1) of the electromagnetic actuator (100) with respect to a stator (M2) of the electromagnetic actuator (100), wherein the control unit (CNT1) is configured to maintain the displacement ( ΔzM1) of the electromagnetic actuator (100) within a predetermined range (RNG1) by controlling movements of the robot (ROBO1) based on the position signal (SZ). 7. The apparatus (500) of claim 6, wherein the control unit (CNT1) is configured to maintain the displacement ( ΔzM1) of the mover M1 from a nominal center position ( ΔzM1=0) smaller than 5 mm. 8. The apparatus (500) according to any of claims 1 to 7, wherein the control unit (CNT1) is configured to adjust the electric current (IC) of the electromagnetic actuator (100) based on a tilt angle ( α1) of the surface processing device (200), so as to maintain the pressing force (FSRF1) substantially independent of the tilt angle ( α1), wherein the tilt angle ( α1) specifies the orientation (AX2) of the surface processing device (200) with respect to the direction (DIRG) of gravity. 9. The apparatus (500) according to any of claims 1 to 8, wherein the electromagnetic actuator (100) is arranged to provide also a pulling actuator force (F1) so as to pull the surface processing device (200) towards the robot (ROBO1). 10. The apparatus (500) according to any of claims 1 to 9, wherein the apparatus (500) is arranged to reverse the direction of the actuator force (F1) by reversing the polarity of the electric current (IC) of the actuator (100), wherein the apparatus (500) comprises a driving unit (DU1), which is arranged to provide a positive electric current (IC) for causing a pushing force (F1), and wherein the driving unit (DU1) is arranged to provide a negative electric current (IC) for causing a pulling force (F1). 11. The apparatus (500) according to any of claims 1 to 10, comprising a force sensor (FSEN1) to provide a force signal (SF1) indicative of the pressing force (FSRF1), wherein the control unit (CNT1) is arranged to control the pressing force (FSRF1) by adjusting the electric current (IC) based on the force signal (SF1). 12. The apparatus (500) according to any of claims 1 to 11, comprising at least one sensor (FSEN1,ASEN1,PSEN1) to measure acceleration (az) of the surface processing device (200) in the axial direction (AX1) of the electromagnetic actuator (100), wherein the control unit (CNT1) is arranged to control the pressing force (FSRF1) by adjusting the electric current (IC) based on the measured acceleration (az). 13. The apparatus (500) according to any of claims 1 to 12, comprising at least one sensor (FSEN1, ASEN1,PSEN1) to measure acceleration (az) of the surface processing device (200) in the axial direction (AX1) of the electromagnetic actuator (100), wherein the control unit (CNT1) is arranged to compensate an effect of the axial acceleration (az) on the pressing force (FSRF1) by adjusting the electric current (IC) of the electromagnetic actuator (100) based on the measured axial acceleration (aZ). 14. The apparatus (500) according to any of claims 1 to 13, wherein the apparatus (500) is arranged to perform a protective operation (EVADE1) when the displacement ( ΔzM1) of the electromagnetic actuator (100) is detected to be within a predetermined region (MRG1), which is outside the allowed movement range (RNG1), the protective operation (EVADE1) comprising stopping a movement of the robot (ROBO1) and/or moving the robot (ROBO1) away from the processed surface (SRF1). 15. The apparatus (500) according to any of claims 1 to 14, wherein the robot (ROBO1) is arranged to perform a transitional movement to move the surface processing device (200) from a first position (x16) to a second position (x0) such that the surface processing device (200) is not in contact with the surface (SRF1), wherein the control system (SYS1) of the apparatus (500) is arranged to control the electric current (IC) such that the electromagnetic actuator (100) prevents and/or dampens movements of the mover (M1) of the electromagnetic actuator (100) with respect to the stator (M2) of the electromagnetic actuator (100) during the transitional movement. 16. The apparatus (500) according to any of claims 1 to 15, wherein the apparatus (500) is arranged to measure the weight (FW1) of the surface processing device (200) by using a force sensor (FSEN1). 17. The apparatus (500) according to any of claims 1 to 16, wherein the surface processing device (200) is an abrading device. 18. The apparatus (500) according to any of claims 1 to 17, wherein the surface processing device (200) is arranged to cause rotary and/or oscillatory motion of an abrasive article (ABR1) with respect to the surface (SRF1). 19. The apparatus (500) according to any of claims 1 to 18, wherein the surface processing device (200) is an orbital sander or a rotary sander. 20. A method for processing a surface (SRF1) by using an apparatus (500), the apparatus (500) comprising: - a surface processing device (200) to process the surface (SRF1), - a robot (ROBO1) to move the surface processing device (200) with respect to the surface (SRF1), and - an electromagnetic actuator (100), the method comprising: - using the electromagnetic actuator (100) to electromagnetically apply an actuator force (F1) to the surface processing device (200), so as to cause the surface processing device (200) to press against the surface (SRF1) with a controlled pressing force (FSRF1), and - controlling the pressing force (FSRF1) by adjusting an electric current (IC) of the electromagnetic actuator (100). |
The actuator force F1 may be equal to the sum of the magnetic force, inertial force, and gravity force of the mover M1 :
F1 = F2 + a z · m M1 + cos(α1)· g z • m M1 (1 )
The pressing force F SRF1 may be equal to the sum of the actuator force, inertial force, and gravity force of the device 200: F SRF1 = F1 + a z · m 200 +cos(α1)·g z ·m 200
Equation (2) may be re-arranged as follows:
F1 = F SRF1 a z · m 200 cos(α1)·g z · m 200 (3)
Equation (3) illustrates how the actuator force F1 may depend on the pressing force F SRF1 exerted on the surface SRF1. The sensor force F1 is equal to the actuator force F1 . The actuator force F1 may be indicative of the pressing force F SRF1 .
Equations (1 ) and (2) may be combined e.g. as follows: F SRF1 = F2 + a z · (m M1 + m 200 ) + cos(α1) · g z • (m M1 + m 200 ) (4)
Equation (4) illustrates how the pressing force F SRF1 may depend on the magnetic force F2 generated by the coil COIL1 .
The apparatus 500 may comprise a force sensor FSEN1 for monitoring the actuator force F1 . The actuator force F1 may also be called as a sensor force. The force sensor FSEN1 may form a force signal SFI indicative of the force F1. The actuator force F1 may be measured with the force sensor FSEN1. The magnetic force F2 may be determined based on the coil current lc. When the actuator force F1 and the magnetic force F2 are known, the axial acceleration may be determined from the difference (F1 -F2) of the forces F1 , F2 e.g. by using the following equation (which may be derived e.g. from equation (1 )):
Thus, the acceleration az may be determined from the signal of the force sensor FSEN1. However, it is not necessary to determine the acceleration from the signal of the force sensor FSEN1. For example, the apparatus 500 may comprise an acceleration sensor ASEN1 for measuring axial acceleration az. Yet, the acceleration may be determined from the signal of the position sensor PSEN1 , as the second derivative of the displacement ΔZ M1 of the mover M1.
The control unit CNT1 may be arranged to adjust the electromagnetic force F2(t) based on the axial acceleration (a z (t)) so as to keep the pressing force F SRF1 (t) substantially equal to the target value F SRF1,TARG . The control unit CNT1 may be arranged to adjust the electromagnetic force F2(t) e.g. according to the following equation (which may be derived based on equation (4)):
F2(t) = F SRF1,TARG - (a z (t) · (m M1 + m 200 ) + cos(α1) · g z • (m M1 + m 200 ))
(6)
In other words, the control unit CNT1 may be arranged to keep the sum of the electromagnetic force F2, the inertial force a z (m M1 +m 200 ), and the gravity force cos(α1) g z (m M1 +m 200 ) substantially equal to the target value F SRF1,TARG by adjusting the electric current (lc) based on the axial acceleration (a z ).
The control unit CNT1 may be configured to control the pressing force F SRF1 by controlling the coil current lc based on the force signal S F1 . The control unit CNT1 may control the coil current lc by providing a force control signal S F2 . The force control signal S F2 may be sent to a driving unit DU1 , which may form the coil current lc according to the force control signal S F2 . The control unit CNT1 may be configured to maintain the pressing force F SRF1 substantially equal to a predetermined target value F SRF1,TARG , by controlling the coil current I C based on the force signal S F1 . The actuator 100 may sometimes operate momentarily as an electric generator, which converts the mechanical movement of the mover M1 into electrical energy. The driving unit DU1 may be arranged to absorb and/or store the electrical energy generated by the actuator 100. The driving unit DU1 may absorb and/or store the electrical energy e.g. in order to damp un-wanted axial oscillations of the surface processing device 200. The driving unit DU1 may e.g. dissipate the electrical energy as heat and/or may store the electrical energy in a capacitor. The driving unit DU1 may comprise e.g. one or more resistors for dissipating electrical energy as heat. The weight (FW1) of the surface processing device 200 and the weight of the mover M1 may be specified e.g. by the operating parameter data PAR1. In an embodiment, the weight (FW1) of the surface processing device 200 may be measured by using the force sensor FSEN1 before processing of the surface SRF1, before the surface processing device 200 is brought into contact with the surface SRF1. For example, the apparatus may measure a first weight value by using the force sensor FSEN1 when the axis AX1 has vertical orientation (or a first orientation), the apparatus may measure a second weight value by using the force sensor FSEN1 when the axis AX1 has horizontal orientation (or a second different orientation), and the apparatus may determine the weight of the surface processing device 200 from the difference of said weight values. The control system SYS1 may comprise a position sensor PSEN1 to monitor the displacement Δz M1 of the mover M1. The position sensor PSEN1 may be e.g. a linear encoder for measuring the position of the mover M1 with respect to the stator M2. The position sensor PSEN1 may also be e.g. a proximity sensor for monitoring the displacement Δz M1 . The position sensor PSEN1 may be e.g. a capacitive, inductive, or optical proximity sensor. The position sensor PSEN1 may form a position signal SZ indicative of the displacement Δz M1 of the mover M1. The control unit CNT1 may be arranged to control movements of the robot ROBO1 based on the position signal S Z . The control unit CNT1 may be arranged to control movements of the robot ROBO1 so as to keep the displacement Δz M1 within the predetermined range RNG1. The control unit CNT1 may form a robot control signal S ROBO1 for controlling the movements of the robot ROBO1. The signal S ROBO1 may be communicated to the robot ROBO1. The actual three-dimensional shape of the surface SRF1 may be specified e.g. by a group of surface points. The position of each surface point may be specified by coordinates (x,y,z). For example, the surface SRF1 may comprise a surface point (x 1 , y 1 , z 1 ). The control system SYS1 may comprise a model of the surface SRF1. The model may be specified e.g. by surface shape data DATA1. The control system SYS1 may comprise a memory MEM1 for storing the surface shape data DATA1. The actual three-dimensional shape of the surface SRF1 may approximately correspond to the shape data DATA1. However, the actual three-dimensional shape of the surface SRF1 does not exactly correspond to the shape data DATA1. In other words, there may be a mismatch between the actual shape of the surface SRF1 and the shape data DATA1. For example, the actual surface SRF1 may comprise an unexpected bump (or a depression) BMP1, which is not specified by the shape data DATA1. The control system SYS1 and the robot ROBO1 cannot fully anticipate the bump BMP1. The surface processing device 200 may experience the bump BMP1 as an unexpected geometric feature. The robot ROBO1 may move the surface processing device 200 in a transverse direction (SX). The surface processing device 200 moving in the transverse direction may hit the bump BMP1 so that the pressing force F SRF1 is momentarily increased (or decreased) due to the axial acceleration (a z ). The sudden change of the pressing force F SRF1 may be detected by analyzing the force signal S F1 . The control unit CNT1 may rapidly decrease (or increase,) the magnetic force F2 based on the force signal S F1 , so as to keep the pressing force F SRF1 approximately equal to the target value F SRF1, TARG . The surface SRF1 may be a horizontal surface, or the orientation of the surface may deviate from the horizontal. The surface processing device 200 may be above the surface SRF1 (Fig.10b) or below the surface SRF1 (Fig.10c), with respect to the direction DIRG of gravity. The control system SYS1 may control movements of the robot ROBO1 so that the axis AX1 of the actuator 100 may be substantially parallel with the local surface normal of the surface SRF1. The orientation of the axis AX1 may be specified by the tilt angle α1, with respect to the direction DIRG of gravity. The control system SYS1 may determine the tilt angle α1 based on the surface shape data DATA1. The target value F SRF1, TARG of the pressing force F SRF1 and the range RNG1 may be specified by operating parameter data PAR1. The control system SYS1 may comprise a memory MEM2 for storing the operating parameter data PAR1. In an embodiment, the apparatus 500 may measure the actual three- dimensional shape of the surface SRF1, by using information about the trajectory of the robot ROBO1 and by using information about the displacement Δz M1 at several different positions (x 2 ,y 2 ,z 2 ) in the trajectory (PATH2) of the robot ROBO1. The apparatus 500 may store the measured actual shape of the surface SRF1 in a memory. The apparatus 500 may determine a difference between the measured actual shape of the surface SRF1 and a nominal shape of the surface SRF1. The apparatus 500 may store the difference in a memory. The measured shape of the surface SRF1 and/or the difference may be used e.g. for quality control purposes. In particular, information about unexpected protrusions and/or dents may be stored for quality control purposes. The apparatus 500 may provide an indication to a user and/or to a control system of a production line when an unexpected protrusion or a dent is detected. In an embodiment, the apparatus 500 may also have an operating mode where the surface processing device 200 is automatically moved along the surface SRF1 in order to gather geometric data for determining surface shape data DATA1. The apparatus 500 may be arranged to operate as measuring instrument for measuring the shape of a surface SRF1. The processing element ABR1 may be optionally and temporarily replaced with a sensing element, which does is used only for detecting the shape of the surface SRF1. The sensing element may have a smooth surface, which does not damage or alter the surface SRF1 when bought into contact with the surface SRF1. The sensing element may be subsequently replaced with an abrasive element ABR1, after the shape of the (first) surface has been measured. The actual processing of the (first) surface, or the actual processing of a second similar surface may be performed after the surface shape data DATA1 of the first surface has been measured. The control system SYS1 may comprise a user interface UIF1 for receiving user input from a (human) user and/or for providing information to the (human) user. The user interface UIF1 may comprise e.g. a display, a touch screen, a mouse, and/or a keyboard. In an embodiment, the user interface UIF1 may also comprise the robot ROBO1. For example, a user may manually move the robot ROBO1 in order to teach desired movements to the apparatus 500. For example, a user may manually move the device 200 along a surface SRF1 in order to gather geometric data for determining surface shape data DATA1. The control system SYS1 may comprise a communication unit RXTX1 for receiving and/or transmitting data. For example, the control system SYS1 may receive surface shape data DATA1 and/or operating parameters via the communication unit RXTX1. The communication unit RXTX1 may communicate e.g. with an Internet server and/or with another device. The communication unit RXTX1 may communicate e.g. via electrical wire, optical cable and/or radio signal. The communication unit RXTX1 may communicate e.g. via a wireless network. The control system SYS1 may be configured to provide modified surface shape data DATA1 based on the geometric deviations BMP1 detected during the processing. The robot ROBO1 and the processing device 200 may be controlled by the control unit CNT1, according to the instructions specified by control signals S ROBO1 , S 200 . The control unit CNT1 may be configured to perform processing operations by executing program code PROG1. The apparatus 500 may comprise a memory MEM1 for storing surface shape data DATA1, a memory MEM2 for storing operating parameter data PAR1, and a memory MEM3 for storing program code PROG1. The control unit CNT1 may be configured to operate the robot ROBO1, the actuator 100, and the device 200 according to operating parameters specified in parameter data PAR1. The parameter data PAR1 may also define e.g. rotation speed values for driving a motor of the device 200. The control unit CNT1 may be arranged to control operation of the surface processing device 200 during the processing. The control unit CNT1 may form a control signal S 200 for controlling operation of the surface processing device 200. The control signal S 200 may be communicated to the device 200 or to a driving unit of the device 200, for controlling operation of the device 200. For example, the control unit CNT1 may start and/or stop operation of the surface processing device 200. For example, the control unit CNT1 may change the rotation speed of a motor of the surface processing device 200. The abrading device 200 may comprise e.g. an electric motor MOTOR1, which may be driven by one or more electric currents I 200 . (Fig.12a). A driving unit DU2 may form the one or more electric currents I 200 for driving the electric motor MOTOR1 at a selected speed of rotation. The driving unit DU2 may form the one or more electric currents I 200 based on a control signal S 200 . z M1 may denote the distance between the positions POS1, POS2. z M2 may denote a distance between the reference position POS2 of the actuator 100 and a reference position REF2 fixed to the arm ARM1 of the robot ROBO1. The reference position POS2 may be specified e.g. by coordinates (x 2 ,y 2 ,z 2 ). Referring to Fig.8b, the control system SYS1 may comprise a current metering unit AM1 to provide a signal S AM1 indicative of the magnitude of the coil current I C . The signal S AM1 may be communicated e.g. to the control unit CNT1 and/or to the driving unit DU1. The optional current metering unit AM1 may be omitted e.g. in a situation where the coil current I C provided by the driving unit DU1 may be determined based on the control signal S F2 . In an embodiment, the magnetic force F2 generated by the actuator 100 may be determined from the magnitude of the coil current I C . In an embodiment, the pressing force may be determined as a combination of the magnetic force F2, the gravitational component caused by the moving parts (M1, 200), and the inertial forces caused by acceleration of the moving parts (M1, 200). The control system SYS1 may comprise an acceleration sensor ASEN1 to provide a signal S AZ indicative of the axial acceleration a Z of the mover M1, in the direction of the axis AX1. The control system SYS1 may determine an inertial component of the pressing force based on the axial acceleration a Z . The optional acceleration sensor ASEN1 may be omitted e.g. in a situation where the axial acceleration a Z may be determined from the signal S Z of the displacement sensor PSEN1. The axial acceleration a Z may be determined as the second derivative of the axial displacement Δz M1 . The control system SYS1 may comprise an orientation sensor OSEN1 to provide a signal S TILT indicative of the orientation α1 of the axis AX1 of the actuator 100 with respect to the direction DIRG of gravity. The control system SYS1 may determine a gravitational component of the pressing force based on the orientation α1. The control system SYS1 may determine a gravitational component of the pressing force based on the orientation α1 and based on the weight of the moving parts (i.e. the weight of the mover M1, the weight of the surface processing device 200). The optional orientation sensor OSEN1 may be omitted e.g. in a situation where the orientation α1 may be determined from one or more control signals S ROBO1 of the robot ROBO1. The optional orientation sensor OSEN1 may be omitted e.g. in a situation where the orientation α1 may be determined from the signal of the acceleration sensor ASEN1. Rapid acceleration of the surface processing device 200 may also cause unwanted movements of the mover M1 with respect to the stator M2. The combination of the driving unit DU1 and the electromagnetic actuator 100 may be arranged to operate as an electromagnetic brake, so as to dampen or prevent unwanted movements. The control unit CNT1 may control the coil current so as to dampen or prevent the unwanted movements. Preventing the unwanted movements may e.g. allow increasing the speed of the movements of the robot ROBO1 during a transitional time period where the surface processing device 200 is not in contact with a surface SRF1. The robot ROBO1 may also perform auxiliary movements e.g. when the apparatus 500 has stopped processing a first object OBJ1, and moves the device 200 to a starting position for processing a second object. The robot ROBO1 may perform a transitional movement to move the surface processing device 200 from a first position (e.g. x 16 ) to a second position (e.g. x 0 ) such that the surface processing device 200 is not in contact with the surface SRF1. The control system SYS1 of the apparatus 500 may be arranged to control the electric current (I C ) such that the electromagnetic actuator 100 prevents and/or dampens movements of the mover M1 of the electromagnetic actuator 100 with respect to the stator M2 of the electromagnetic actuator 100 during the transitional movement. In an embodiment, the mover M1 may be temporarily driven to an end position END21 or END22, and the mover may be subsequently kept at the end position END21 or END22 with a sufficient magnetic force F2 during a transitional movement. In other words, the mover M1 may be temporarily parked at an end position END21 or END22 for performing a transitional movement. The apparatus 500 may optionally comprise an additional brake BRAKE1 to prevent unwanted movements of the mover M1 with respect to the stator M2. The brake BRAKE1 may comprise e.g. an additional actuator which is arranged to press a first friction element (e.g. a braking shoe) against a second friction element according to a brake control signal S B . The brake BRAKE1 may allow or prevent movements of the mover M1 according to the brake control signal S B . The brake BRAKE1 may also be arranged to damp movements of the mover M1 by absorbing energy from the mover M1. Yet, the brake BRAKE1 may comprise e.g. a locking element (e.g. locking pin or a clamp) to allow or prevent movements of the mover M1, according to the brake control signal S B . Referring to Fig. 9, the control unit CNT1 may be configured to control the magnetic force F2 by using a first control loop LOOP1. The control unit CNT1 may be configured to control the displacement Δz M1 by using a second control loop LOOP2. The first control loop LOOP1 may comprise the force sensor FSEN1, the control unit CNT1, and the actuator 100. The tilt angle α1 of the actuator 100 and the geometric shape of the processed surface SRF1 may have an effect on the pressing force F SRF1 . The force sensor may provide a force signal S F1 indicative of the pressing force F SRF1 (step #910). A sudden change of the pressing force F SRF1 may be detected by comparing the force signal S F1 with a target value (step #920). The control unit CNT1 may adjust the coil current I C based on the force signal S F1 (step #930). The second control loop LOOP2 may comprise the position sensor SPOS1, the control unit CNT1, and the robot ROBO1. The geometric shape of the processed surface SRF1 may have an effect on the displacement Δz M1 . The position sensor SPOS1 may form a signal S Z indicative of the displacement Δz M1 (step #810). The control unit CNT1 may be configured to compare the measured displacement Δz M1 with the predetermined allowed range RNG1 (step #820). The control unit CNT1 may be configured to control movements of the robot ROBO1 based on the comparison, so as to keep the displacement Δz M1 within the range RNG1 (step #830). Figs. 10a, 10b, 10c show how the gravitational component (F W1 =cos(α1)·g z ·m 200 ) caused by the mass of the surface processing device 200 may depend on the tilt angle α1. The tilt angle α1 may specify the orientation of the axis AX1 of the actuator 100 with respect to the direction DIRG of gravity. Fig.10a shows a situation where the axis AX1 is horizontal, and the tilt angle α1 = 90°. The gravitational component F W1 may be zero. In this case, the gravitational component F W1 does not have an effect on the pressing force F SRF1 . N1 denotes the surface normal of the surface SRF1, at the position where the linear extension of the axis AX1 (and the axis AX2) meets the surface SRF1. Fig. 10b shows a situation where the axis AX1 is parallel with the direction DIRG of gravity, and the surface processing device 200 is above the surface SRF1. The gravitational component F W1 may be equal to g z ·m 200 . In this case, the gravitational component F W1 increases the pressing force F SRF1 . Fig. 10c shows a situation where the axis AX1 is parallel with the direction DIRG of gravity, and the surface processing device 200 is below the surface SRF1. The gravitational component F W1 may be equal to -1·g z ·m 200 . In this case, the gravitational component F W1 reduces the pressing force F SRF1 . The actuator 100 may be arranged to generate a pulling actuator force F1 in a situation where the target value F SRF1,TARG of the pressing force F SRF1 is smaller than the weight of the surface processing device 200. The actuator 100 may be arranged to generate a pushing actuator force F1 in a situation where the target value F SRF1,TARG of the pressing force F SRF1 is greater than the weight of the surface processing device 200. Fig.11a, 11b, 11c, 11d show a situation where the surface processing device 200 hits an unexpected bump BMP1 of the surface SRF1. The robot ROBO1 may move the device 200 in the transverse direction SX at a transverse velocity VEL1. The symbol h BMP1 denotes the height of the bump BMP1. PATH1 denotes the path of the point POS1 of the mover M1. PATH2 denotes the path of the point POS2 of the stator M2. z M1 (t) denotes the distance between the points POS1, POS2, as a function of time t. z 0 (t) denotes the distance between the point POS1 and the surface SRF1. The distance z 0 (t) may be defined by the axial dimension of the surface processing device 200 and the axial dimension of the force sensor FSEN1. The distance z 0 (t) may remain constant or substantially constant during operation. x 0 denotes a transverse position where the processing element ABR1 of the surface processing device 200 propagates along a flat portion of the surface SRF1, at a time t 0 , before hitting the bump BMP1. The processing element ABR1 may be e.g. an abrasive disk. x 11 denotes a transverse position where the leading edge EDG1 of the processing element ABR1 of the surface processing device 200 first time hits the bump BMP1. The collision of the surface processing device 200 with the bump BMP1 may suddenly push the surface processing device 200 upwards. The collision may accelerate the surface processing device 200 in the axial direction AX1. The control unit CNT1 may adjust the magnetic force F2 based on the force signal S F1 . The control unit CNT1 may have a fast (faster) response to the detected change of the pressing force F SRF1 , e.g. within a spatial region indicated by the symbol FAST1. The control unit CNT1 may have a slow (slower) response to the detected change of displacement Δz M1 e.g. within a spatial region indicated by the symbol SLOW1, respectively. x 13 denotes a transverse position (of the leading edge EDG1) where the surface processing device 200 has maximum axial velocity component dv z /dt. The collision with the unexpected bump BMP1 causes a displacement Δz M1 of the actuator 100. x 15 denotes a transverse position where the leading edge EDG1 reaches a flat portion of the surface SRF1 again, after passing the bump BMP1. The control unit CNT1 may control the movements of the robot ROBO1, so as to compensate the detected displacement Δz M1 . In particular, the control unit CNT1 may modify the path PATH2 of the point POS2 of the stator M2. The control unit CNT1 may modify the path PATH2 e.g. within a spatial region indicated by the symbol SLOW2. The control unit CNT1 may have a slow (slower) response for modifying the path PATH2, when compared with the fast (faster) response for adjusting the magnetic force F2. x 16 denotes a transverse position where the a change of displacement Δz M1 of the actuator 100 has been fully compensated, as a time t 16 . Fig.11b shows temporal evolution Δz M1 (t) of the displacement Δz M1 during the time period where the surface processing device 200 propagates over the bump BMP1, as shown in Fig. 11a. The leading edge EDG1 of the element ABR1 may coincide with the transverse positions x 0 , x 11 , x 13 , x 15 , x 16 at times t 0 , t 11 , t 13 , t 15 , t 16 , respectively. The displacement Δz M1 may reach an extreme value (-h BMP1 or +h BMP1 ) at a time t 15 . Fig.11c shows evolution of several parameters during the time period where the surface processing device 200 propagates over the bump BMP1, as shown in Fig.11a. The uppermost graph of Fig. 11c shows the displacement Δz M1 (t) as the function of time t. The second graph from the top of Fig. 11c shows temporal evolution of the axial acceleration dv z /dt of the surface processing device 200. The device 200 may experience maximum axial acceleration at a time t 12 . The time t 12 may be between the times t 11 and t 13 . The device 200 may experience maximum axial deceleration (i.e. negative acceleration) at a time t 14 . The time t 14 may be between the times t 13 and t 15 . The third graph from the top of Fig.11c show temporal evolution F1(t) of the actuator force F1. The solid curve F1(t) shows temporal evolution of the actuator force F1 in a situation where the coil current I C is adjusted based on the measured actuator force F1. The dashed curve shows temporal evolution F1(t) of the actuator force F1 in a comparative situation where the coil current I C is kept constant. The fourth graph from the top of Fig.11c shows temporal evolution F2(t) of the magnetic force F2 generated by the actuator 100. In an embodiment, the direction of the magnetic force F2 may be reversed, so as to compensate a sudden change of the pressing force F SRF1 . The actuator may during a short time period even pull the mover M1 upwards (e.g. at the time t 12 ), instead of pushing the device 200 against the surface SRF2. The fifth graph from the top of Fig.11c shows temporal evolution I C (t) of the coil current I C , so as to generate the magnetic force F2. In an embodiment, the polarity of the coil current I C may be temporarily reversed, so as to compensate a sudden change of the pressing force F SRF1 . The lowermost graph of Fig. 11c show temporal evolution F SRF1 (t) of the pressing force F SRF1 . The temporal evolution F SRF1 (t) of the pressing force F SRF1 may correspond to the temporal evolution F1(t) of the actuator force F1. The pressing force F SRF1 (t) may be determined from the actuator force F1(t) by adding the gravitational and inertial components caused by the surface processing device 200. The solid curve F SRF1 (t) shows temporal evolution of the pressing force F SRF1 in the situation where the coil current I C is adjusted based on the measured actuator force F1. F SRF1,MIN and F SRF1,MAX may denote the minimum and the maximum value of the pressing force F SRF1 in the situation where the coil current I C is adjusted based on the measured actuator force F1. F SRF1,TARG may denote the target value of the pressing force F SRF1. The dashed curve shows the temporal evolution F SRF1 (t) of the pressing force F SRF1 in the comparative situation where the coil current I C is kept constant. F' SRF1,MIN and F' SRF1,MAX may denote the minimum and the maximum value of the pressing force F SRF1 in the comparative situation. Fig. 11d shows temporal evolution of the axial position z POS1 (t) of the mover M1, temporal evolution of the axial position z POS2 (t) of the stator M2, and temporal evolution of the displacement Δz of the mover M1 with respect to the stator M2, in a situation where the surface processing device 200 is moved along the surface SRF1 over the bump BMP1. The surface SRF1 may comprise a sloped portion BMP1 between a first flat portion and a second flat portion of the surface SRF1. The first flat portion may have an elevation z 1A . The second flat portion may have an elevation z 1B . The difference z 1B - z 1A may be equal to the height h BMP1 of the sloped portion BMP1. The stator M2 may have a vertical position z 2A before the surface processing device 200 meets the bump BMP1. The control system SYS1 may control the vertical position of the stator M2, by controlling the position of the robot ROBO1, such that the displacement Δz M1 of the mover M1 may be substantially equal to zero before the surface processing device 200 meets the bump BMP1. When the surface processing device 200 meets the bump BMP1, the control system SYS1 may detect a change of the displacement Δz M1 based on the signal S Z of the displacement sensor PSEN1. The control system SYS1 may gradually compensate the change of the displacement Δz M1 by moving the robot ROBO1 and the stator M2 such that the displacement Δz M1 of the mover M1 may be substantially equal to zero after passing over the bump BMP1. The maximum absolute value of the displacement Δz M1 (t 15 ) at the time t 15 may also be smaller than the maximum absolute value of the allowed displacement Δz END2 of the movement range RNG1. The stator M2 may have a vertical position z 2B after the change of the displacement Δz M1 has been compensated at the time t 16 . Fig.11e shows the temporal evolution of the pressing force in two situations where the surface processing device 200 collides with the surface SRF1 with a high velocity. The solid curve shows the temporal evolution of the pressing force in a situation where inertial forces caused by the impact are at least partly compensated by the electromagnetic actuator 100. The control system SYS1 may detect the impact e.g. based on the force signal S F1 and/or based on acceleration a z of the mover M1. The control system SYS1 may adjust the coil current I C based on the force signal S F1 and/or based on an acceleration signal such that the inertial forces caused by the impact are at least partly compensated by the electromagnetic actuator 100. The surface processing device 200 may first contact the surface SRF1 at the time t 20 . The pressing force F SRF1 may reach a local maximum F PEAK at time t 21 . Compensation of the impact forces may reduce risk of damaging the surface SRF1. After the impact, the control system SYS1 may rapidly adjust the coil current I C based on the force signal S F1 such that the pressing force FSRF1 becomes equal to the target value F SRF1, TARG at a time t 23 . The dashed curve shows the temporal evolution of the pressing force in a comparative situation where the surface processing device 200 is supported by a pneumatic spring without using the electromagnetic actuator 100. In the comparative example, the pressing force FSRF1 may temporarily reach a high maximum value F MAX at a time t 21 due to the inertial forces caused by the impact. The high force may involve a risk of damaging the surface SRF1. The pneumatic spring may have been initially filled with pressurized air so as to provide an initial force F PRE after the impact at a time t 22 . The target value of the pressing force may be F SRF1, TARG . Pressurized air may be gradually added to the pneumatic spring via a valve so as to increase the force generated by the pneumatic spring. The force generated by the pneumatic spring may be gradually increased until the pressing force reaches the target value F SRF1, TARG at a time t 24 . Fig. 11f shows the temporal evolution of the pressing force in two situations where the surface processing device 200 is slowly brought into contact with the surface SRF1. The solid curve shows the temporal evolution of the pressing force in a situation where the pressing force FSRF1 is controlled by using the electromagnetic actuator 100. The surface processing device 200 may first contact the surface SRF1 at the time t 30 . The control system SYS1 may rapidly adjust the coil current I C based on the force signal S F1 such that the pressing force F SRF1 becomes equal to the target value F SRF1, TARG at a time t 33 . The electromagnetic actuator 100 may control the pressing force F SRF1 faster and/or more accurately than a pneumatic spring. The dashed curve shows the temporal evolution of the pressing force in a comparative situation where the surface processing device 200 is supported by a pneumatic spring without using the electromagnetic actuator 100. The pneumatic spring may have been initially filled with pressurized air so as to provide an initial force F PRE after the first contact at a time t 31 . The target value of the pressing force may be F SRF1, TARG . The control system may detect after the time t 31 that actual pressing force is smaller than the target value F SRF1, TARG . Starting from a time t 32 , pressurized air may be gradually added to the pneumatic spring via a valve so as to increase the force generated by the pneumatic spring. The force generated by the pneumatic spring may be gradually increased until the pressing force reaches the target value F SRF1, TARG at a time t 34 . Fig. 11f shows the temporal evolution of the pressing force in two situations where the surface processing device 200 is slowly brought into contact with the surface SRF1. The solid curve shows the temporal evolution of the pressing force in a situation where the pressing force FSRF1 is controlled by using the electromagnetic actuator 100. The surface processing device 200 may first contact the surface SRF1 at the time t 40 . The control system SYS1 may rapidly adjust the coil current I C based on the force signal S F1 such that the pressing force F SRF1 becomes equal to the target value F SRF1, TARG at a time t 41 . The electromagnetic actuator 100 may control the pressing force F SRF1 faster and/or more accurately than a pneumatic spring. The dashed curve shows the temporal evolution of the pressing force in a comparative situation where the surface processing device 200 is supported by a pneumatic spring without using the electromagnetic actuator 100. The pneumatic spring may have been initially filled with pressurized air so as to provide an initial force F PRE at a time t 42 . The target value of the pressing force may be F SRF1, TARG . The control system may detect after the time t 42 that actual pressing force is greater than the target value F SRF1, TARG . Pressurized air may be gradually removed from the pneumatic spring via a valve so as to decrease the force generated by the pneumatic spring. Pressurized air may be gradually removed from the pneumatic spring after the time t 43 . The force generated by the pneumatic spring may be gradually decreased until the pressing force reaches the target value F SRF1, TARG at a time t 44 . Referring back to Fig. 1, the surface processing device 200 may be e.g. a rotary sanding machine or an orbital sanding machine. The sanding machine may also be called as an abrading device. The surface processing device 200 may comprise processing element ABR1 for processing the surface SRF1. The surface SRF1 may be processed with the element ABR1 by causing oscillatory and/or rotary motion of the element ABR1 when the element is in contact with the surface SRF1. The element ABR1 may be e.g. an abrading element. The element ABR1 may also be e.g. a soft element, which is arranged to apply e.g. a wax coating to the surface SRF1 The apparatus 500 may be arranged to process a surface SRF1 of the object by abrading. The surface processing device 200 may be an abrading device. The term abrading may include e.g. grinding, sanding, polishing and/or honing. The abrading device 200 may be e.g. a random orbital sander device. Referring to Figs.12a and 12b, the surface processing device 200 may be e.g. an orbital sander device 200. The processing element ABR1 may be e.g. an abrasive article. The device 200 may comprise means REL1 for holding the processing element ABR1. The device 200 may comprise a rotating and/or oscillating support element PAD1 to hold the element ABR1. The element ABR1 may be releasably attached the support element PAD1. The element ABR1 may be attached the support element PAD1 e.g. by hook and loop fasteners (REL1). The element ABR1 may also be attached the support element PAD1 e.g. by pressure sensitive adhesive. The device 200 may be an orbital sander, which may be arranged to cause orbital oscillation of the element ABR1. The device 200 may comprise e.g. an electric motor or a pneumatic motor MOTOR1 to cause oscillation and/or rotation of the processing element ABR1. The device 200 may comprise an eccentric pivot mechanism ECC1 to convert a rotary motion of the motor MOTOR1 into an oscillatory motion of the element ABR1. The device 200 may comprise a rotating and/or oscillating support element PAD1 to hold the element ABR1. The pivot mechanism ECC1 may cause oscillation of the support element PAD1. The motor MOTOR1 may drive the pivot mechanism ECC1 e.g. via a shaft 240. The motor MOTOR1 may have a first axis AX2 of rotation. The support element PAD1 may be eccentrically pivoted to the shaft of the motor MOTOR1 by one or more bearings BEA2. The pivot point may have a pivot axis AX3. The displacement e1 between the axis AX2 and the pivot axis AX3 may be e.g. in the range of 0.5 mm to 20 mm, typically in the range of 1.25 to 6 mm. Each abrasive grain of the abrasive element ABR1 may move along a substantially circular orbit, which has a diameter of two times the displacement value e1. In an embodiment, the rotation of the support element PAD1 of the orbital sanding device may be substantially prevented during eccentric oscillation of the support element PAD1. The device 200 may comprise e.g. a braking seal SEAL3 to allow oscillation of the support element PAD1 while preventing free rotation of the support element PAD1. The device 200 may comprise e.g. a resilient belt to allow oscillation of the support element PAD1 while preventing free rotation of the support element PAD1. In an embodiment, the orbital sanding device may comprise a gearbox to cause controlled rotation of the oscillating support element PAD1. In an embodiment, the support element PAD1 of the orbital sanding device 200 may be arranged to rotate freely during eccentric oscillation of the support element PAD1. The device 200 may comprise one or more attachment elements FIX1, for connecting the device 200 to the actuator 100 or to the force sensor FSEN1. An attachment element FIX1 may comprise e.g. connection flange and/or a thread for forming a threaded joint. Processing the surface SRF1 with the abrasive element ABR1 forms released particles. The abrasive grains of the abrasive element ABR1 separate small particles from the surface by grinding. The released particles may comprise e.g. particles formed from the material of the surface SRF1 and/or abrasive grains detached from the abrasive element ABR1. The element ABR1 and the support element PAD1 may comprise one or more openings for removing the released particles together with an air flow AIR1. The element ABR1 and the support element PAD1 may define one or more ducts DUC2 for removing the released particles together with an air flow AIR1. The device 200 may comprise a suction port 252, which is connectable to suction system, so as to suck air and released particles from the abrading device 200. The suction system may cause a partial vacuum, which may draw air and released particles from the device 200. The suction port 252 may be in fluid connection with the particle- removing ducts DUC2 and/or with the cooling ducts DUC1. The suction port 252 may be connected e.g. to a dust suction device e.g. via a flexible hose. The electric motor MOTOR1 may comprise a rotating rotor ROTO1, a non- rotating stator STAT1, and one or more bearings BEA1a, BEA1b. The electric motor MOTOR1 may receive one or more driving currents via a connector C3. The abrading device 200 may comprise one or more ducts DUC1 for an air flow AIR1, so as to cool the motor MOTOR1. The device 200 may comprise one or more flow guiding elements 250 to guide an air flow AIR1 near the casing 210 of the motor MOTOR1, so as to cool the motor MOTOR1. The device 200 may comprise one or more seals SEAL4, SEAL5 to protect critical parts of the device 200 from released particles. The abrasive element ABR1 may be e.g. a coated abrasive article, which comprises abrasive grains attached to a carrier layer. The element ABR1 may be e.g. a coated abrasive article, which comprises abrasive grains attached to a carrier mesh layer. The element ABR1 may be e.g. a bonded abrasive article, which comprises abrasive grains carried in a matrix. In an embodiment, the surface processing device 200 may also be arranged e.g. to polish a wax layer applied on the processed surface SRF1. The wax layer may be applied e.g. on a painted surface of an automobile or on the hull of a boat. The processing element ABR1 may comprise a soft material layer for polishing the surface without causing abrasion. In an embodiment, it is not necessary to supply pressurized air to the electromagnetic actuator 100. The electromagnetic actuator 100 does not require a pneumatic connection, can thus be used at a processing site SITE1 which does not have a pneumatic infrastructure Further aspects are illustrated by the following examples: Example 1. A surface processing apparatus (500), comprising: - a surface processing device (200) to process a surface (SRF1), - a robot (ROBO1) to move the surface processing device (200) with respect to the surface (SRF1), - an electromagnetic actuator (100) to electromagnetically apply an actuator force (F1) to the surface processing device (200), so as to cause the surface processing device (200) to press against the surface (SRF1) with a controlled pressing force (F SRF1 ), and - a control unit (CNT1) to control the pressing force (F SRF1 ) by adjusting an electric current (I C ) of the electromagnetic actuator (100). Example 2. The apparatus (500) of example 1, further comprising a position sensor (PSEN1) to form a position signal (S Z ) indicative of a displacement ( Δz M1 ) of a mover (M1) of the electromagnetic actuator (100) with respect to a stator (M2) of the electromagnetic actuator (100), wherein the control unit (CNT1) is configured to maintain the displacement ( Δz M1 ) of the electromagnetic actuator (100) within a predetermined range (RNG1) by controlling movements of the robot (ROBO1) based on the position signal (S Z ). Example 3. The apparatus (500) of example 2, wherein the control unit (CNT1) is configured to maintain the displacement ( Δz M1 ) of the mover M1 from a nominal center position ( Δz M1 =0) smaller than 5 mm. Example 4. The apparatus (500) according to any of examples 1 to 3, wherein the control unit (CNT1) is configured to adjust the electric current (I C ) of the electromagnetic actuator (100) based on a tilt angle ( α1) of the surface processing device (200), so as to maintain the pressing force (F SRF1 ) substantially independent of the tilt angle ( α1), wherein the tilt angle ( α1) specifies the orientation (AX2) of the surface processing device (200) with respect to the direction (DIRG) of gravity. Example 5. The apparatus (500) according to any of examples 1 to 4, wherein the electromagnetic actuator (100) is arranged to provide also a pulling actuator force (F1) so as to pull the surface processing device (200) towards the robot (ROBO1). Example 6. The apparatus (500) according to any of examples 1 to 5, comprising a force sensor (FSEN1) to provide a force signal (S F1 ) indicative of the pressing force (F SRF1 ), wherein the control unit (CNT1) is arranged to control the pressing force (F SRF1 ) by adjusting the electric current (I C ) based on the force signal (S F1 ). Example 7. The apparatus (500) according to any of examples 1 to 6, comprising at least one sensor (FSEN1,ASEN1,PSEN1) to measure acceleration (a z ) of the surface processing device (200) in the axial direction (AX1) of the electromagnetic actuator (100), wherein the control unit (CNT1) is arranged to control the pressing force (F SRF1 ) by adjusting the electric current (I C ) based on the measured acceleration (a z ). Example 8. The apparatus (500) according to any of examples 1 to 7, comprising at least one sensor (FSEN1, ASEN1,PSEN1) to measure acceleration (a z ) of the surface processing device (200) in the axial direction (AX1) of the electromagnetic actuator (100), wherein the control unit (CNT1) is arranged to compensate an effect of the axial acceleration (a z ) on the pressing force (F SRF1 ) by adjusting the electric current (I C ) of the electromagnetic actuator (100) based on the measured axial acceleration (a Z ). Example 9. The apparatus (500) according to any of examples 1 to 8, wherein the apparatus (500) is arranged to perform a protective operation (EVADE1) when the displacement ( Δz M1 ) of the electromagnetic actuator (100) is detected to be within a predetermined region (MRG1), which is outside the allowed movement range (RNG1), the protective operation (EVADE1) comprising stopping a movement of the robot (ROBO1) and/or moving the robot (ROBO1) away from the processed surface (SRF1). Example 10. The apparatus (500) according to any of examples 1 to 9, wherein the robot (ROBO1) is arranged to perform a transitional movement to move the surface processing device (200) from a first position (x 16 ) to a second position (x 0 ) such that the surface processing device (200) is not in contact with the surface (SRF1), wherein the control system (SYS1) of the apparatus (500) is arranged to control the electric current (I C ) such that the electromagnetic actuator (100) prevents and/or dampens movements of the mover (M1) of the electromagnetic actuator (100) with respect to the stator (M2) of the electromagnetic actuator (100) during the transitional movement. Example 11. The apparatus (500) according to any of examples 1 to 10, wherein the apparatus (500) is arranged to measure the weight (F W1 ) of the surface processing device (200) by using a force sensor (FSEN1). Example 12. The apparatus (500) according to any of examples 1 to 11, wherein the surface processing device (200) is an abrading device. For the person skilled in the art, it will be clear that modifications and variations of the devices and the methods according to the present invention are perceivable. The figures are schematic. The particular embodiments described above with reference to the accompanying drawings are illustrative only and not meant to limit the scope of the invention, which is defined by the appended claims.