METHOD AND APPARATUS FOR THERMAL TREATMENT OF COATED SUBSTRATES, IN PARTICULAR THIN-FILM SOLAR SUBSTRATES

WIPO Patent Application WO/2018/115444

A3

The invention relates to a method for thermal treatment of a flat substrate with a first side that is to be coated or is already coated and a second side opposite said first side, by generating a homogeneous temperature distribution on the first side and heating the substrate from the second side by means of a heating system. The method comprises the following steps: Measuring a height profile of the substrate and a temperature profile of the substrate and minimizing a measured deviation of the height profile from the plane by controlling the heating system to modify the temperature profile of the substrate by way of a control algorithm and depending on properties of the substrate and the measured height and temperature profiles.

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ERB ERHARD (DE)
WEHRFRITZ PETER (DE)
CORD BERNHARD (DE)
RÜTH EDGAR (DE)
HEILINGBRUNNER JOCHEN (DE)

PCT/EP2017/084392

December 06, 2018

December 22, 2017

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SINGULUS TECH AG (DE)

H01L31/18

WO2011157422A2

2011-12-22

US20090199594A1

2009-08-13

VOSSIUS & PARTNER (DE)

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