Title:
METHOD FOR BENDING THIN FILM MEMBER
Document Type and Number:
WIPO Patent Application WO/2017/145706
Kind Code:
A1
Abstract:
The present invention addresses the problem of achieving a method such as isotropic etching for bending a thin film member in which the etching stop position differs from the position at which bending from IIB processing begins. Provided is a method for bending a thin film member comprising: a step for laminating a support layer formation starting layer 20' and a thin film member formation starting layer 30' on a substrate 10; a step for forming the thin film member 30 by patterning the thin film member formation starting layer 30'; a step for forming, on the thin film member via a position-controlling layer support layer formation starting layer 60', a position-controlling layer 50 for determining the position at which a cantilever structure of the thin film member begins to bend as a result of ion irradiation; a step for removing a portion of the support layer formation starting layer 20' below the thin film member and a portion of the position-controlling layer support layer formation starting layer 60' so that the circumferential surface 21 of the support layer and the end face 61 of the position-controlling layer support layer 60 are on or inside a line extended downward from the leading edge 51 of the position-controlling material layer to form the cantilever structure 40, which has a free leading end 41, on the thin film member 30; and a step for irradiating ions on a portion of the cantilever structure with the position-controlling layer 50 as a mask to bend a portion of the cantilever structure 40.
Inventors:
YOSHIDA TOMOYA (JP)
SAKAKIBARA YOUICHI (JP)
SAKAKIBARA YOUICHI (JP)
Application Number:
PCT/JP2017/003980
Publication Date:
August 31, 2017
Filing Date:
February 03, 2017
Export Citation:
Assignee:
NAT INST ADVANCED IND SCIENCE & TECH (JP)
International Classes:
B81C1/00; G01R1/073; G02B6/125; G02B6/136
Foreign References:
| JP2009252689A | 2009-10-29 | |||
| JP2011140072A | 2011-07-21 | |||
| JPH08273522A | 1996-10-18 | |||
| US20110109952A1 | 2011-05-12 | |||
| US8442368B1 | 2013-05-14 |
Attorney, Agent or Firm:
SHIGENOBU Kazuo et al. (JP)
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