Title:
METHOD FOR BLACKENING WHITE FLUORIDE SPRAY COATING, AND FLUORIDE SPRAY COATING COVERING MEMBER HAVING BLACK LAYER ON SURFACE
Document Type and Number:
WIPO Patent Application WO/2013/114942
Kind Code:
A1
Abstract:
The purpose of the present invention is to obtain a fluoride spray coating covering member that has excellent halogen corrosion resistance and plasma erosion resistance, and that has identification symbols or the like such as text, numerals, shapes, patterns, company names, or production number displayed thereon. In the present invention, ions of one or more injection gases selected from a fluorine-containing gas, oxygen gas, and an inert gas are injected onto a white fluoride spray coating formed on the surface of a substrate, whereby at least a part of the white fluoride spray coating is blackened and a black ion injection layer is formed.
Inventors:
HARADA YOSHIO (JP)
TERATANI TAKEMA (JP)
MIKI SHINYA (JP)
TOGOE KENICHIRO (JP)
TERATANI TAKEMA (JP)
MIKI SHINYA (JP)
TOGOE KENICHIRO (JP)
Application Number:
PCT/JP2013/050603
Publication Date:
August 08, 2013
Filing Date:
January 16, 2013
Export Citation:
Assignee:
TOCALO CO LTD (JP)
International Classes:
C23C4/04; C23C14/48; C23C28/04
Foreign References:
| JP2002037683A | 2002-02-06 | |||
| JP4512603B2 | 2010-07-28 | |||
| JP2854104B2 | 1999-02-03 | |||
| JPS61209973A | 1986-09-18 |
Attorney, Agent or Firm:
GINZA MARONIE P. C. (JP)
Patent business corporation Ginza horse chestnut patent firm (JP)
Patent business corporation Ginza horse chestnut patent firm (JP)
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