METHOD FOR CALIBRATING SHAPE MEASUREMENT DEVICE, AND SHAPE MEASUREMENT DEVICE

WIPO Patent Application WO/2015/040995

A1

　Provided are a method for calibrating a shape measurement device, whereby a simpler shape measurement device can be calibrated by a simple method, and a shape measurement device calibrated by the calibration method. The method of the present invention for calibrating a shape measurement device for measuring a shape of a measurement subject mounted on a stage for moving in one axis direction, the shape measurement device having two interferometers disposed facing each other along a movement direction of the stage, has a step for detecting a relative inclination of detection axes of the two interferometers, and a step for acquiring information including an offset of the detection axes of the interferometers and a tilt angle of a movement axis of the stage in relation to the detection axes of the interferometers and calculating the offset and the tilt angle from the information using a plurality of reference spheres having different diameters.

ISHIDA TAKESHI (JP)
SOWA SEIJI (JP)
YOSHIDA SHUNICHIRO (JP)

PCT/JP2014/071709

March 26, 2015

August 20, 2014

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KONICA MINOLTA INC (JP)

G01B11/24; G01B11/27

JP2012002726A	2012-01-05
JP2004045231A	2004-02-12
JP2012242085A	2012-12-10

R KRUGER-SEHM ET AL.: "Proposal for a guideline to calibrate interference microscopes for use in roughness measurements", INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, vol. 41, no. ISSUES, October 2001 (2001-10-01), pages 2123 - 2137

TAMURA Keijiro et al. (JP)
Keijichiro Tamura (JP)

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