Title:
METHOD OF CLEANING CHAMBER OF VACUUM EVAPORATION APPARATUS FOR PRODUCTION OF ORGANIC EL ELEMENT
Document Type and Number:
WIPO Patent Application WO/2004/000987
Kind Code:
A1
Abstract:
Recovering and reutilizing compounds, such as Alq3, accumulated on the internal surface of chamber in the production of organic EL elements and disposed of to thereby reduce production cost. The internal surface of chamber or internal members of chamber to which Alq3 and other compounds have stuck are cleaned with a fluorinated alcohol, such as 2,2,3,3,4,4,5,5-octafluoropentanol, thereby recovering Alq3.
Inventors:
HAYASHI NOBUYA (JP)
NARUI SHINICHIRO (JP)
OKAMOTO HIDEKAZU (JP)
TSUZAKI MASAAKI (JP)
NARUI SHINICHIRO (JP)
OKAMOTO HIDEKAZU (JP)
TSUZAKI MASAAKI (JP)
Application Number:
PCT/JP2003/007773
Publication Date:
December 31, 2003
Filing Date:
June 19, 2003
Export Citation:
Assignee:
ASAHI GLASS CO LTD (JP)
HAYASHI NOBUYA (JP)
NARUI SHINICHIRO (JP)
OKAMOTO HIDEKAZU (JP)
TSUZAKI MASAAKI (JP)
HAYASHI NOBUYA (JP)
NARUI SHINICHIRO (JP)
OKAMOTO HIDEKAZU (JP)
TSUZAKI MASAAKI (JP)
International Classes:
C11D3/24; C11D7/30; C11D7/50; C11D11/00; C23C14/12; C23C14/56; C11D7/28; H01L51/00; H01L51/30; H01L51/40; H01L51/56; (IPC1-7): C11D7/28; H05B33/10; H05B33/14; C23C14/00; B08B3/14
Foreign References:
| JP2002151260A | 2002-05-24 | |||
| JP2001015267A | 2001-01-19 | |||
| JP2001185364A | 2001-07-06 | |||
| JP2000353593A | 2000-12-19 | |||
| JPS59157196A | 1984-09-06 | |||
| JPH02261900A | 1990-10-24 | |||
| JPH06211718A | 1994-08-02 | |||
| JPH06346095A | 1994-12-20 | |||
| JPH0764284A | 1995-03-10 |
Other References:
See also references of EP 1514918A4
Attorney, Agent or Firm:
Senmyo, Kenji (38 Kanda-Higashimatsushitach, Chiyoda-ku Tokyo, JP)
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