Title:
METHOD OF CLEANING ELECTRONIC MATERIAL AND CLEANING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2011/114885
Kind Code:
A1
Abstract:
The disclosed electronic material cleaning system is provided with a chemical cleaning means (1), a wet cleaning means (2), and a single wafer cleaning device (3). The chemical cleaning means (1) has: a functional chemical storage tank (6); and an electrolytic reaction device (8) that is connected to the functional chemical storage tank (6) via a concentrated sulfuric acid electrolytic line (7). The functional chemical storage tank (6) is able to supply a functional chemical (W1) to the single safer cleaning device (3) via a functional chemical supply line (10). The wet cleaning means (2) is provided with: a nitrogen gas supply line (22) that interconnects a purified water supply line (21) and a nitrogen gas source; and an internally mixing two-fluid nozzle (23) connected to each of the purified water supply line (21) and the nitrogen gas supply line (22). Droplets (W2) formed from nitrogen gas and purified water are able to be sprayed from the end of the two-fluid nozzle (23). As a result of this electronic material cleaning system, the time required for a resist-stripping treatment of an electronic material is shortened, and furthermore it is possible to reliably eliminate resist residue in a short period of time by means of wet cleaning after resist stripping.
Inventors:
YAMAKAWA Haruyoshi (4-7 Nishi-Shinjuku 3-chome, Shinjuku-k, Tokyo 83, 〒1608383, JP)
山川 晴義 (〒83 東京都新宿区西新宿三丁目４番７号 栗田工業株式会社内 Tokyo, 〒1608383, JP)
山川 晴義 (〒83 東京都新宿区西新宿三丁目４番７号 栗田工業株式会社内 Tokyo, 〒1608383, JP)
Application Number:
JP2011/054739
Publication Date:
September 22, 2011
Filing Date:
March 02, 2011
Export Citation:
Assignee:
KURITA WATER INDUSTRIES LTD. (4-7 Nishi-Shinjuku 3-chome, Shinjuku-ku Tokyo, 83, 〒1608383, JP)
栗田工業株式会社 (〒83 東京都新宿区西新宿三丁目４番７号 Tokyo, 〒1608383, JP)
YAMAKAWA Haruyoshi (4-7 Nishi-Shinjuku 3-chome, Shinjuku-k, Tokyo 83, 〒1608383, JP)
栗田工業株式会社 (〒83 東京都新宿区西新宿三丁目４番７号 Tokyo, 〒1608383, JP)
YAMAKAWA Haruyoshi (4-7 Nishi-Shinjuku 3-chome, Shinjuku-k, Tokyo 83, 〒1608383, JP)
International Classes:
H01L21/304; B08B3/08; B08B3/10; G03F7/42; H01L21/027
Attorney, Agent or Firm:
HAYAKAWA, Yuzi et al. (Sansui Patent Firm, 4th Floor Akasaka Wing Bldg., 6-6-15, Akasaka, Minato-k, Tokyo 52, 〒1070052, JP)
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Claims: