METHOD FOR CLEANING FILTER, AND METHOD FOR WASHING OR DRYING BODY TO BE TREATED

Title:

METHOD FOR CLEANING FILTER, AND METHOD FOR WASHING OR DRYING BODY TO BE TREATED

Document Type and Number:

WIPO Patent Application WO/2012/111139

Kind Code:

A1

Abstract:

In order to efficiently clean a filter for filtering a gas, liquid or supercritical carbon dioxide, which is to used to wash and/or dry a body to be treated, this method for cleaning a filter for filtering a gas, liquid or supercritical carbon dioxide, which is to be used to wash and/or dry a body to be treated involves cleaning the filter (13) by flushing the filter (13) with carbon dioxide before using the filter (13) to filter the gas, liquid or supercritical carbon dioxide.

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Inventors:

SUGAWARA HIROSHI (JP)
ONO YOSHINORI (JP)

Application Number:

PCT/JP2011/053498

Publication Date:

August 23, 2012

Filing Date:

February 18, 2011

Export Citation:

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Assignee:

ORGANO CORP (JP)
SUGAWARA HIROSHI (JP)
ONO YOSHINORI (JP)

International Classes:

B01D65/06; B01D29/01; B01D46/00; B01D61/14; B01D61/16; B08B7/00; H01L21/304

Foreign References:

JP2011045818A	2011-03-10
JP2008066495A	2008-03-21
JP2005279473A	2005-10-13
JP2005279472A	2005-10-13
JP2006247600A	2006-09-21
JP2009194092A	2009-08-27

Attorney, Agent or Firm:

MIYAZAKI, Teruo et al. (JP)
Akio Miyazaki (JP)

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Claims:

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