Title:
METHOD FOR CLEANING SUBSTRATE AND APPARATUS FOR CLEANING SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2010/035396
Kind Code:
A1
Abstract:
Disclosed are a method for cleaning a substrate and an apparatus for cleaning a substrate that remove contaminants such as particles adhered onto the surface of the substrate. The method and the apparatus can realize a high throughput and, at the same time, can effectively remove particles and the like.
In order to clean the backside (Wb) of a substrate (W), DIW cooled to a temperature around the solidification point of DIW and a cooling gas of a temperature below the solidification point of DIW are ejected toward the center of the lower surface of the substrate being rotated. The cooled DIW, when flown along the backside (Wb) of the substrate, removes particles and the like adhered onto the substrate.
Inventors:
FUJIWARA, Naozumi (1-1,Tenjinkita-cho, Horikawa-dori Teranouchi-agaru 4-chome, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
藤原直澄 (〒85 京都府京都市上京区堀川通寺之内上る４丁目天神北町１番地の１ 大日本スクリーン製造株式会社内 Kyoto, 〒6028585, JP)
KATO, Masahiko (1-1,Tenjinkita-cho, Horikawa-dori Teranouchi-agaru 4-chome, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
藤原直澄 (〒85 京都府京都市上京区堀川通寺之内上る４丁目天神北町１番地の１ 大日本スクリーン製造株式会社内 Kyoto, 〒6028585, JP)
KATO, Masahiko (1-1,Tenjinkita-cho, Horikawa-dori Teranouchi-agaru 4-chome, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
Application Number:
JP2009/004010
Publication Date:
April 01, 2010
Filing Date:
August 21, 2009
Export Citation:
Assignee:
DAINIPPON SCREEN MFG. CO., LTD. (1-1Tenjinkita-cho, Horikawa-dori Teranouchi-agaru 4-chome Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
大日本スクリーン製造株式会社 (〒85 京都府京都市上京区堀川通寺之内上る４丁目天神北町１番地の１ Kyoto, 〒6028585, JP)
FUJIWARA, Naozumi (1-1,Tenjinkita-cho, Horikawa-dori Teranouchi-agaru 4-chome, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
藤原直澄 (〒85 京都府京都市上京区堀川通寺之内上る４丁目天神北町１番地の１ 大日本スクリーン製造株式会社内 Kyoto, 〒6028585, JP)
大日本スクリーン製造株式会社 (〒85 京都府京都市上京区堀川通寺之内上る４丁目天神北町１番地の１ Kyoto, 〒6028585, JP)
FUJIWARA, Naozumi (1-1,Tenjinkita-cho, Horikawa-dori Teranouchi-agaru 4-chome, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
藤原直澄 (〒85 京都府京都市上京区堀川通寺之内上る４丁目天神北町１番地の１ 大日本スクリーン製造株式会社内 Kyoto, 〒6028585, JP)
International Classes:
H01L21/304; B08B3/04; B08B3/10
Attorney, Agent or Firm:
FURIKADO, Shoichi et al. (4F TAKAGI BLDG, 1-19 Nishitenma 5-chome, Kita-ku, Osaka-sh, Osaka 47, 〒5300047, JP)
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