Title:
METHOD FOR COATING CARBON NANOTUBES CONTAINING AN INSULATION LAYER, AND VACUUM SUCTION APPARATUS COATED WITH CARBON NANOTUBES
Document Type and Number:
WIPO Patent Application WO/2013/187677
Kind Code:
A1
Abstract:
The present invention provides a method for coating carbon nanotubes containing an insulation layer, capable of minimizing the amount of leakage at a suction surface of a vacuum suction apparatus, and the vacuum suction apparatus having an insulation layer formed by the carbon nanotube coating method. The method for coating carbon nanotubes containing an insulation layer according to the present invention comprises the steps of: preparing a suction unit made of a bare material which is not surface-treated or anodized; dissolving polymeric plastics in a solvent consisting of DMF, DMAc and/or NMP so as to prepare a plastic solution; coating the plastic solution onto the suction surface of the suction unit so as to form an insulation layer; mixing carbon nanotubes, a binder consisting of DMF, DMAc and NMP, and a solvent so as to prepare a carbon nanotube solution; and coating the carbon nanotube solution onto the insulation layer so as to form an antistatic layer.
Inventors:
KIM DOOJONG (KR)
LEE JAEDUK (KR)
KANG YONGPIL (KR)
KIM SEUNGYEOL (KR)
LEE JAEDUK (KR)
KANG YONGPIL (KR)
KIM SEUNGYEOL (KR)
Application Number:
PCT/KR2013/005148
Publication Date:
December 19, 2013
Filing Date:
June 11, 2013
Export Citation:
Assignee:
TOPNANOSYS INC (KR)
International Classes:
H01L21/687; H01L21/02
Foreign References:
| KR20120052476A | 2012-05-24 | |||
| JP2009208366A | 2009-09-17 | |||
| JP2004009165A | 2004-01-15 | |||
| JP2004124086A | 2004-04-22 |
Attorney, Agent or Firm:
CHUN, Sunghoon (KR)
천성훈 (KR)
천성훈 (KR)
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