Title:
METHOD OF SURFACE−PROCESSING COMPONENTS OF VACUUM PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2003/019633
Kind Code:
A1
Abstract:
A vacuum processing device (20) and a method of surface−processing the components of a vacuum processing device, the device capable of performing such a processing that unnecessary deposit such as reactive byproduct is adhered onto the surface of at least a part of the components, for example, capable of performing a film forming processing onto a processed body (W) comprising a vacuum processing container (22) and components including a shower head (26)&semi the method for surface processing comprising the step of applying a chemical polishing processing, an electrolytic processing, or a fluid polishing processing to the components (22, 26, ...) of the processing device (20) beforehand to increase the adhesion of deposit onto the surface of the components (22, 26) so as to suppress the occurrence of particles by the separation of the components.
Inventors:
Miyagawa, Noboru c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Wakabayashi, Satoshi c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Wakabayashi, Satoshi c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Application Number:
PCT/JP2002/008534
Publication Date:
March 06, 2003
Filing Date:
August 23, 2002
Export Citation:
Assignee:
TOKYO ELECTRON LIMITED (3-6 Akasaka 5-chome, Minato-ku, Tokyo, 107-8481, JP)
Miyagawa, Noboru c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Wakabayashi, Satoshi c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Miyagawa, Noboru c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
Wakabayashi, Satoshi c/o Tokyo Electron AT Limited (650 Mitsuzawa, Hosaka-ch, Nirasaki-shi Yamanashi, 407-0192, JP)
International Classes:
B08B7/02; B08B3/08; C23C16/44; H01J37/32; H01L21/205; (IPC1-7): H01L21/205; B08B3/08; B08B7/02
Attorney, Agent or Firm:
Yoshitake, Kenji (Kyowa Patent & Law Office, Room 323 Fuji Bldg., 2-3, Marunouchi 3-chom, Chiyoda-ku Tokyo, 100-0005, JP)