METHOD AND COMPUTER PROGRAM PRODUCT FOR OCT MEASUREMENT BEAM ADJUSTMENT

Title:

METHOD AND COMPUTER PROGRAM PRODUCT FOR OCT MEASUREMENT BEAM ADJUSTMENT

Document Type and Number:

WIPO Patent Application WO/2020/094709

Kind Code:

A3

Abstract:

The invention relates to a method for ascertaining translational deviations between the measuring coordinate system (15) of a measuring mirror scanner (13), which can be tilted about two axes (C, D) and deflects a measuring beam (12) in two dimensions, and the processing coordinate system (10) of a processing mirror scanner (7), which can be tilted about two axes (A, B) and deflects both the measuring beam (12) deflected by the measuring mirror scanner (13) and a processing beam (3) in two dimensions onto a workpiece (2). The measuring beam (12') reflected on the workpiece (2) travels back on the path of the incident measuring beam (12) and is captured by a high-resolution measuring sensor (17) in order to determine high-resolution information about the workpiece (2). In a zero position of the measuring mirror scanner (13), the reflected measuring beam (12') is imaged in the sensor image (18) of the measuring sensor (17) onto a previously known image position (19). The method comprises different method steps, so that an ascertainment of a translational deviation (Δχ, Δy) between the processing coordinate system and the measuring coordinate system (10, 15) based on the deviation, present in the sensor image (18) of the measuring sensor (17), between the previously known image position (19) corresponding to the focus position of the processing beam (3) and the pinhole diaphragm center (20') determined from the height information is completed.

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Inventors:

STAMBKE MARTIN (DE)
HERMANI JAN-PATRICK (DE)
NOTHEIS THOMAS (DE)
SAUTER ALEXANDER (DE)

Application Number:

PCT/EP2019/080378

Publication Date:

July 02, 2020

Filing Date:

November 06, 2019

Export Citation:

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Assignee:

TRUMPF LASER & SYSTEMTECHNIK GMBH (DE)
TRUMPF LASER GMBH (DE)

International Classes:

B23K26/03; B23K26/044; B23K26/082; B23K26/21; G01B11/03; G01B11/14; G01B11/24; G01B11/26; G01C1/00; G01C3/00

Foreign References:

DE102015012565B3	2016-10-27
US5521374A	1996-05-28
JP2008196980A	2008-08-28

Attorney, Agent or Firm:

TRUMPF PATENTABTEILUNG (DE)

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